公开(公告)号：US10707059B2

公开(公告)日：2020-07-07

申请号：US15306132

申请日：2014-05-09

申请人： EV Group E. Thallner GmbH

发明人： Thomas Glinsner ,  Christoph Flotgen ,  Johann Bernauer ,  Thomas Wagenleitner ,  Thomas Wieser ,  Florian Schmid ,  Thomas Plach ,  Roman Anzengruber ,  Alexander Nones ,  Uwe Kriebisch

IPC分类号： H01L21/00 ,  H01J37/32 ,  H01L21/687 ,  H01L21/3065 ,  H01L21/67

摘要： A device for bombarding at least one substrate with a plasma with a first electrode and a second electrode that can be arranged opposite thereto, which electrodes are formed together producing the plasma between the electrodes wherein at least one of the electrodes is formed from at least two electrode units. In addition, this invention relates to a corresponding method.

公开(公告)号：US20170047203A1

公开(公告)日：2017-02-16

申请号：US15306132

申请日：2014-05-09

申请人： EV Group E. Thallner GmbH

发明人： Thomas Glinsner ,  Christoph Flotgen ,  Johann Bernauer ,  Thomas Wagenleitner ,  Thomas Wieser ,  Florian Schmid ,  Thomas Plach ,  Roman Anzengruber ,  Alexander Nones ,  Uwe Kriebisch

IPC分类号： H01J37/32 ,  H01L21/3065 ,  H01L21/67

摘要： A device for bombarding at least one substrate with a plasma with a first electrode fiend a second electrode that can be arranged opposite thereto, which electrodes are formed together producing the plasma between the electrodes wherein at least one of the electrodes is formed from at least two electrode units. In addition, this invention relates to a corresponding method.

摘要翻译： 一种用于用具有第一电极的等离子体轰击至少一个衬底的装置，可以与其相对布置的第二电极，这些电极一起形成在电极之间产生等离子体，其中至少一个电极由至少两个 电极单元。 此外，本发明涉及相应的方法。