公开(公告)号：US20240247762A1

公开(公告)日：2024-07-25

申请号：US18420669

申请日：2024-01-23

Applicant: ENTEGRIS, INC.

Inventor： Edward E. Jones ,  Sanado Barolli ,  Blake Edmund Johnson ,  Joseph Kevin Kenney

IPC: F17C13/04

CPC classification number: F17C13/04 ,  F17C2201/0104 ,  F17C2205/0391 ,  F17C2250/0626

Abstract: A device includes a housing including a first chamber having a first pressure regulating device, a first fluid inlet, and a first fluid outlet. The first pressure regulating device includes a plurality of first levers; a first spring; and a first pressure activated device. In response to an external pressure decreasing, the first pressure activated device overcomes a first closing force and opens the first fluid inlet. A second chamber has a second pressure regulating device including a second fluid inlet and a second fluid outlet; a plurality of second levers; a second spring; and a second pressure activated device configured to constrict as the external pressure increases. In response to the external pressure decreasing, the second pressure activated device is configured to overcome a second closing force and open the second fluid inlet.