ACOUSTO-OPTIC SYSTEM HAVING PHASE-SHIFTING REFLECTOR

    公开(公告)号:US20210226406A1

    公开(公告)日:2021-07-22

    申请号:US16636605

    申请日:2018-09-20

    IPC分类号: H01S3/106 G02F1/33 G02F1/29

    摘要: A beam positioner can be broadly characterized as including a first acousto-optic (AO) deflector (AOD) operative to diffract an incident beam of linearly polarized laser light, wherein the first AOD has a first diffraction axis and wherein the first AOD is oriented such that the first diffraction axis has a predetermined spatial relationship with the plane of polarization of the linearly polarized laser light. The beam positioner can include at least one phase-shifting reflector arranged within a beam path along which light is propagatable from the first AOD. The at least one phase-shifting reflector can be configured and oriented to rotate the plane of polarization of light diffracted by the first AOD.

    LOCATION OF IMAGE PLANE IN A LASER PROCESSING SYSTEM

    公开(公告)号:US20190001434A1

    公开(公告)日:2019-01-03

    申请号:US16067711

    申请日:2017-03-17

    摘要: Disclosed is a method and an apparatus to process a workpiece including producing a first beam of laser energy characterized by a first spatial intensity distribution. A first workpiece is processed using the first beam of laser energy to form a plurality of features at a first distance between the scan lens and the first workpiece and forming a second features at a second distance. The method includes determining which of the plurality of features has a shape that most closely resembles the shape of the first spatial intensity distribution and setting a process distance as the distance that produced that feature. Using this process distance, a surface of a second workpiece is processed using second beam of laser energy with a second spatial intensity distribution.