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公开(公告)号：US20230307883A1
公开(公告)日：2023-09-28
申请号：US18326463
申请日：2023-05-31
发明人： James BROOKHYSER , Jan KLEINERT , Jered RICHTER
摘要： A beam positioner for deflecting a beam path, along which a diffracted beam of linearly polarized laser light is propagatable, within a two-dimensional scan field, the beam positioner includes a first acousto-optic deflectors (AOD) to deflect the beam path within a first one-dimensional scan field extending along a first axis of the two-dimensional scan field, a second AOD to deflect the beam path within a second one-dimensional scan field extending along a second axis of the two-dimensional scan field, a phase retarder arranged between the first AOD and the second AOD and within the beam path along which the beam of laser light is propagatable from the first AOD and a mirror arranged between the first AOD and the second AOD and within the beam path along which the beam of laser light is propagatable from the first AOD.
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2.发明公开公开(公告)号：US20240017350A1
公开(公告)日：2024-01-18
申请号：US18253838
申请日：2021-11-23
发明人： Jan KLEINERT , Ruolin CHEN , James BROOKHYSER , Mark UNRATH , Honghua HU
IPC分类号： B23K26/0622 , B23K26/03
CPC分类号： B23K26/0622 , B23K26/03 , B23K2101/42
摘要： A laser-processing apparatus can carry out a process to form a via in a workpiece, having a first material formed on a second material, by directing laser energy onto the workpiece such that the laser energy is incident upon the first material, wherein the laser energy has a wavelength to which the first material is more reflective than the second material. The apparatus can include a back-reflection sensing system operative to capture a back-reflection signal corresponding to a portion of laser energy directed to the workpiece and reflected by the first material and generate a sensor signal based on the captured back-reflection signal; and a controller communicatively coupled to an output of the back-reflection sensing system, wherein the controller is operative to control a remainder of the process by which the via is formed based on the sensor signal.
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公开(公告)号：US20230390866A1
公开(公告)日：2023-12-07
申请号：US18252059
申请日：2021-11-23
发明人： James BROOKHYSER , Jan KLEINERT , Jered RICHTER , Mark UNRATH
IPC分类号： B23K26/082 , B23K26/06
CPC分类号： B23K26/0821 , B23K26/0648 , B23K26/0676 , B23K26/0643 , B23K26/0665
摘要： Numerous embodiments of optical relay systems are disclosed. In one embodiment, a laser-processing apparatus includes an optical relay system configured to correct for beam placement errors by maintaining the optical path length of a beam of laser energy between a first positioner and a scan lens. In another embodiment, the optical relay system may include a first lens, a second lens, and a zoom lens assembly arranged between the first lens and the second lens, wherein the zoom lens assembly includes a first lens group and a second lens group. The zoom lens assembly may be movable relative to the first lens and the second lens (e.g., mounted on a positioner, such as a motion stage). The distance between the lenses of the first lens group and the distance between the lenses of the second lens group may be fixed or variable.
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公开(公告)号：US20220168847A1
公开(公告)日：2022-06-02
申请号：US17599756
申请日：2020-05-29
发明人： Jan KLEINERT , Zhibin LIN , Joel SCHRAUBEN , Mark UNRATH , Honghua HU , Ruolin CHEN , Chuan YANG , Geoffrey LOTT , Daragh FINN
IPC分类号： B23K26/362 , B23K26/0622 , B23K26/082 , B23K26/06 , G02F1/33
摘要： Numerous embodiments are disclosed. Many of which relate to methods of forming vias in workpieces such as printed circuit boards. Some embodiments relates techniques for indirectly ablating a region of an electrical conductor structure of, for example, a printed circuit board by spatially distributing laser energy throughout the region before the electrical conductor is indirectly ablated. Other embodiments relate to techniques for temporally-dividing laser pulses, modulating the optical power within laser pulses, and the like.
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