公开(公告)号：US20240274394A1

公开(公告)日：2024-08-15

申请号：US18437572

申请日：2024-02-09

Applicant: EBARA CORPORATION

Inventor： Yasushi TOMA ,  Tsutomu KARIMATA ,  Sadashi AOTA ,  Shinsetsu FUJISAWA

IPC: H01J37/12

CPC classification number: H01J37/12 ,  H01J37/28 ,  H01J2237/038

Abstract: Provided is an insulating structure used in a vacuum for a charged particle beam device, the insulating structure including: an anode; a cathode facing the anode; and an insulator disposed between the anode and the cathode, wherein the insulator has: an insulator flat surface; and an insulator convex portion protruding from the insulator flat surface, the cathode has: a cathode flat surface; and a cathode concave portion which is recessed from the cathode flat surface and into which the insulator convex portion is fitted; the insulator flat surface and the cathode flat surface are not in contact with each other; and an outer surface of the insulator convex portion and an inner surface of the cathode concave portion are not in contact with each other.