Pressure sensor fault detection
    1.
    发明申请

    公开(公告)号:US20070169557A1

    公开(公告)日:2007-07-26

    申请号:US11340316

    申请日:2006-01-26

    IPC分类号: G01L9/12

    CPC分类号: G01L27/007 G01L9/12

    摘要: A diagnostic system for a pressure sensor having a cavity configured to receive on applied pressure is provided. The cavity has a first and a second wall. A deflectable diaphragm is positioned in the cavity and configured to form a first and a second capacitance with the first wall and a third and a fourth capacitance with the second wall which change in response to the applied pressure. The capacitances form a first transfer function and a second transfer function. Changes in the first transfer function relative to the second transfer function are detected to provide a diagnostic output.

    Pressure sensor with deflectable diaphragm
    2.
    发明申请
    Pressure sensor with deflectable diaphragm 有权
    压力传感器具有偏转膜片

    公开(公告)号:US20070151349A1

    公开(公告)日:2007-07-05

    申请号:US11312062

    申请日:2005-12-20

    IPC分类号: G01L9/00

    CPC分类号: G01L9/0075 G01L13/025

    摘要: A pressure sensor for sensing a pressure of a process fluid includes a sensor body having a cavity formed therein. A deflectable diaphragm is positioned in the cavity and deflects in response to a pressure applied to the cavity. An electrode on the diaphragm forms a variable capacitor with the pressure sensor body. The capacitance varies in response to the applied pressure.

    摘要翻译: 用于感测加工流体的压力的压力传感器包括其中形成有空腔的传感器主体。 可偏转膜片位于空腔中并响应于施加到空腔的压力而偏转。 隔膜上的电极与压力传感器主体形成可变电容器。 电容随施加的压力而变化。

    Pressure sensor with deflectable diaphragm
    3.
    发明授权
    Pressure sensor with deflectable diaphragm 有权
    压力传感器具有偏转膜片

    公开(公告)号:US07415886B2

    公开(公告)日:2008-08-26

    申请号:US11312062

    申请日:2005-12-20

    IPC分类号: G01L9/12

    CPC分类号: G01L9/0075 G01L13/025

    摘要: A pressure sensor for sensing a pressure of a process fluid includes a sensor body having a cavity formed therein. A deflectable diaphragm is positioned in the cavity and deflects in response to a pressure applied to the cavity. An electrode on the diaphragm forms a variable capacitor with the pressure sensor body. The capacitance varies in response to the applied pressure.

    摘要翻译: 用于感测加工流体的压力的压力传感器包括其中形成有腔的传感器主体。 可偏转膜片位于空腔中并响应于施加到空腔的压力而偏转。 隔膜上的电极与压力传感器主体形成可变电容器。 电容随施加的压力而变化。