公开(公告)号：US07845542B2

公开(公告)日：2010-12-07

申请号：US11233553

申请日：2005-09-22

申请人： Daniel D. Evans, Jr. ,  James D. O'Bryan, Jr.

发明人： Daniel D. Evans, Jr. ,  James D. O'Bryan, Jr.

IPC分类号： B23K20/10 ,  B23K1/06

CPC分类号： B23K20/004 ,  B23K2101/40 ,  H01L24/48 ,  H01L24/78 ,  H01L24/85 ,  H01L2224/05599 ,  H01L2224/4809 ,  H01L2224/48095 ,  H01L2224/48465 ,  H01L2224/78302 ,  H01L2224/85205 ,  H01L2224/85399 ,  H01L2924/00014 ,  H01L2924/01005 ,  H01L2924/01006 ,  H01L2924/01015 ,  H01L2924/01019 ,  H01L2924/01033 ,  H01L2924/0104 ,  H01L2924/01052 ,  H01L2924/01082 ,  H01L2924/14 ,  Y10T156/1002 ,  H01L2224/45099 ,  H01L2924/00

摘要： A process control procedure for a bonding process includes predetermining a deformation limit and a deforming time limit is for deforming a bonding precursor member. The bonding precursor member is deformed while monitoring instantaneous deformation values and instantaneous deforming time values for the bonding precursor member. A deforming shut-down time value is set at an instantaneous deforming time value corresponding to an occurrence of a first condition or a second condition. The first condition is an instantaneous deformation value for the bonding precursor member reaching the deformation limit and the second condition is an instantaneous deforming time value for the bonding precursor member reaching the deforming time limit. Deformation of the bonding precursor member is shut down at the deforming shut-down time value, thereby producing a deformed bond member from the bonding precursor member.

摘要翻译： 用于接合工艺的工艺控制程序包括预先确定变形极限，并且变形时间限制用于使接合前体构件变形。 接合前体构件在监测接合前体构件的瞬时变形值和瞬时变形时间值的同时变形。 变形关闭时间值被设定为对应于第一状态或第二状态的发生的瞬时变形时间值。 第一条件是接合前体部件达到变形极限的瞬时变形值，第二条件是接合前体部件达到变形时限的瞬时变形时间值。 接合前体构件的变形在变形关闭时间值处停止，从而从接合前体构件产生变形的接合构件。