Abstract:
A circular target having a copper backing and a front target face material of scandiumtritide is mounted with its face perpendicular to the axis of an elongated member which is pivoted through a center hole of an end plate of a cup-shaped member wherein the center hole coincides with the longitudinal axis of an axial ion beam. A screw member having an off-center hole is adapted to threadedly engage the interior threaded walls of the cup-shaped member and through which the elongated member also passes. The rotation of the screw causes the target to revolve around the longitudinal axis of the ion beam at a varying radius as measured from the ion beam, such varying radius being a function of the rotation of the screw member. This causes the ion beam to trace a spiral pattern upon the target face. In an alternative embodiment, the elongated member is also pivoted at a median point along its length but passes through an off-center hole in a disc which is captured but free to rotate within a ring screw adapted to threadedly engage the interior walls of the cupshaped member. This embodiment provides a concentric circle pattern on the face of the target in conjunction with the ion beam.