Optical measuring device and method

    公开(公告)号:US09603518B2

    公开(公告)日:2017-03-28

    申请号:US14831850

    申请日:2015-08-20

    Abstract: An optical measuring device is provided. An actuator of a reference mirror set drives a reference mirror to move back and forth at a scan velocity. A first light source module transmits a first light beam to an optical coupling module transmitting two parts of the first light beam respectively to an examinee object and the reference mirror set. The first light beam then is reflected by the examinee object and reference mirror set and then transmitted to the optical coupling module and the processing unit. The second light source module transmits a second light beam to the examinee object. Then the second light beam is reflected and then transmitted to the second sensing unit. The second sensing unit provides a sensing signal to the processing unit which accordingly provides a value of the relative velocity. The thickness is calculated according to the relative velocity and the scan velocity.

    Optical apparatus and operating method thereof
    2.
    发明授权
    Optical apparatus and operating method thereof 有权
    光学装置及其操作方法

    公开(公告)号:US09013708B2

    公开(公告)日:2015-04-21

    申请号:US13774257

    申请日:2013-02-22

    CPC classification number: G01B9/02015

    Abstract: An optical apparatus includes a light source, an optical coupling module, a reference light reflection module, and a data processing module. The light source provides an incident light. The optical coupling module divides the incident light into a reference light and a detection light emitting to the reference light reflection module and the object respectively. The reference light reflection module reflects the reference light and rapidly change the optical path of the reference light. The optical coupling module receives a first reflected light generated by the reference light reflection module reflecting the reference light and a second reflected light generated by the object reflecting the detection light and it interferes the first reflected light and second reflected light to generate a light interference signal. The data processing module receives and analyzes the light interference signal to obtain an optical detection result related to the object.

    Abstract translation: 光学装置包括光源,光耦合模块,参考光反射模块和数据处理模块。 光源提供入射光。 光耦合模块将入射光分为参考光和分别发射到参考光反射模块和物体的检测光。 参考光反射模块反射参考光并快速改变参考光的光路。 光耦合模块接收反射参考光的参考光反射模块产生的第一反射光和反射检测光的物体产生的第二反射光,并且其干涉第一反射光和第二反射光以产生光干涉信号 。 数据处理模块接收并分析光干扰信号以获得与该对象相关的光学检测结果。

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