METHOD FOR PREPARING A NANOSHEET AND A MULTILAYER STRUCTURE

    公开(公告)号:US20210398800A1

    公开(公告)日:2021-12-23

    申请号:US16903572

    申请日:2020-06-17

    IPC分类号: H01L21/02

    摘要: The present invention relates to a method for preparing a nanosheet including the steps of: depositing a solution onto a substrate to form a first layer, wherein the substrate is rotatable relative to the depositing solution; depositing and condensing target material onto the first layer to form a second layer; and separating the second layer from the first layer and the substrate to form a nanosheet. Also disclosed a multilayer structure including: a substrate; a first layer arranged to deposit onto the substrate, wherein the substrate is rotatable relative to the depositing of the first layer; and a second layer arranged to deposit onto the first layer and separable from the first layer to form a nanosheet.