Optical modulator using monocrystalline and polycrystalline silicon

    公开(公告)号:US11036069B2

    公开(公告)日:2021-06-15

    申请号:US16356982

    申请日:2019-03-18

    Abstract: Embodiments provide for an optical modulator, comprising: a lower guide, comprising: a lower hub, made of monocrystalline silicon; and a lower ridge, made of monocrystalline silicon that extends in a first direction from the lower hub; an upper guide, including: an upper hub; and an upper ridge, made of monocrystalline silicon that extends in a second direction, opposite of the first direction, from the upper hub and is aligned with the lower ridge; and a gate oxide layer separating the lower ridge from the upper ridge and defining a waveguide region with the lower guide and the upper guide.

    Optical modulator using monocrystalline and polycrystalline silicon

    公开(公告)号:US11619838B2

    公开(公告)日:2023-04-04

    申请号:US17302632

    申请日:2021-05-07

    Abstract: Embodiments provide for an optical modulator, comprising: a lower guide, comprising: a lower hub, made of monocrystalline silicon; and a lower ridge, made of monocrystalline silicon that extends in a first direction from the lower hub; an upper guide, including: an upper hub; and an upper ridge, made of monocrystalline silicon that extends in a second direction, opposite of the first direction, from the upper hub and is aligned with the lower ridge; and a gate oxide layer separating the lower ridge from the upper ridge and defining a waveguide region with the lower guide and the upper guide.

    Thermo-optic phase shifter with thermal bridge

    公开(公告)号:US10394059B1

    公开(公告)日:2019-08-27

    申请号:US16221300

    申请日:2018-12-14

    Abstract: An optical apparatus comprises a first arm comprising a first optical waveguide configured to propagate a first optical signal, and a first thermo-optic (TO) phase shifter arranged proximate to the first optical waveguide. The optical apparatus further comprises a second arm comprising a second optical waveguide configured to propagate a second optical signal, and a second TO phase shifter arranged proximate to the second optical waveguide. The optical apparatus further comprises a thermal bridge arranged between the first TO phase shifter and the second TO phase shifter.

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