Removal of Surface Oxides by Electron Attachment
    1.
    发明申请
    Removal of Surface Oxides by Electron Attachment 有权
    通过电子附件去除表面氧化物

    公开(公告)号:US20090223831A1

    公开(公告)日:2009-09-10

    申请号:US12119701

    申请日:2008-05-13

    IPC分类号: C25F5/00

    摘要: The present invention relates to a method for removing metal oxides from a substrate surface. In one particular embodiment, the method comprises: providing a substrate, a first, and a second electrode that reside within a target area; passing a gas mixture comprising a reducing gas through the target area; supplying an amount of energy to the first and/or the second electrode to generate electrons within the target area wherein at least a portion of the electrons attach to a portion of the reducing gas and form a negatively charged reducing gas; and contacting the substrate with the negatively charged reducing gas to reduce the metal oxides on the surface of the substrate.

    摘要翻译: 本发明涉及从衬底表面去除金属氧化物的方法。 在一个特定实施例中,该方法包括:提供驻留在目标区域内的衬底,第一和第二电极; 将包含还原气体的气体混合物通过所述目标区域; 向第一和/或第二电极提供一定量的能量以在目标区域内产生电子,其中至少一部分电子附着到一部分还原气体并形成带负电荷的还原气体; 并使基板与带负电荷的还原气体接触以减少基板表面上的金属氧化物。

    Removal of surface oxides by electron attachment
    4.
    发明授权
    Removal of surface oxides by electron attachment 有权
    通过电子附着去除表面氧化物

    公开(公告)号:US07897029B2

    公开(公告)日:2011-03-01

    申请号:US12119701

    申请日:2008-05-13

    IPC分类号: C25F5/00

    摘要: The present invention relates to a method for removing metal oxides from a substrate surface. In one particular embodiment, the method comprises: providing a substrate, a first, and a second electrode that reside within a target area; passing a gas mixture comprising a reducing gas through the target area; supplying an amount of energy to the first and/or the second electrode to generate electrons within the target area wherein at least a portion of the electrons attach to a portion of the reducing gas and form a negatively charged reducing gas; and contacting the substrate with the negatively charged reducing gas to reduce the metal oxides on the surface of the substrate.

    摘要翻译: 本发明涉及从衬底表面去除金属氧化物的方法。 在一个特定实施例中,该方法包括:提供驻留在目标区域内的衬底,第一和第二电极; 将包含还原气体的气体混合物通过所述目标区域; 向第一和/或第二电极提供一定量的能量以在目标区域内产生电子,其中至少一部分电子附着到一部分还原气体并形成带负电荷的还原气体; 并使基板与带负电荷的还原气体接触以减少基板表面上的金属氧化物。