公开(公告)号：US20240385541A1

公开(公告)日：2024-11-21

申请号：US18790520

申请日：2024-07-31

Applicant: Carl Zeiss SMT GmbH ,  ASML Netherlands B.V.

Inventor： Wilbert KRUITHOF ,  Parham YAGHOOBI ,  John LEO

IPC: G03F7/00

Abstract: A lithography system for extreme ultraviolet (EUV) radiation includes a housing (25) with an interior (24) containing a residual gas (27), and at least one gas-binding component (29) which is arranged in the interior (24) and has a gas-binding material for binding contaminating substances (28). The gas-binding component (29) has at least one flow duct (33) having at least one surface with the gas-binding material, with a gas flow of the residual gas (27) in the flow duct (33) having a Knudsen number of between 0.01 and 5, preferably between 0.01 and 0.5, in particular between 0.01 and 0.3, and with a casing (26) which encapsulates a beam path of the EUV lithography system (1) being arranged in the interior (24) of the housing (25). The casing (26) preferably has an opening (37) with a maintenance shaft (36) in which the gas-binding component (29) is arranged.

公开(公告)号：US20220308463A1

公开(公告)日：2022-09-29

申请号：US17833041

申请日：2022-06-06

Applicant: Carl Zeiss SMT GmbH

Inventor： Dirk EHM ,  Wilbert KRUITHOF ,  Timo LAUFER

IPC: G03F7/20

Abstract: Method for avoiding a degradation of an optical element, wherein the optical element is arranged in a housing, comprising: a) determining a first degradation value; b) determining a second degradation value, wherein the first degradation value and the second degradation value are determined at different times; c) forming a degradation profile based on the first degradation value and the second degradation value; d) calculating a temporal development of the degradation profile; e) determining at least one predicted degradation value based on the calculated temporal development of the degradation profile; f) comparing the at least one predicted degradation value with a predefinable first limit degradation value; g) monitoring for a predefinable first deviation between the at least one predicted degradation value and the first limit degradation value; h) feeding a first decontamination medium into the interior if attainment of the predefinable first deviation is identified.

公开(公告)号：US20200218160A1

公开(公告)日：2020-07-09

申请号：US16825740

申请日：2020-03-20

Applicant: Carl Zeiss SMT GmbH

Inventor： Wilbert KRUITHOF ,  Dirk Heinrich EHM ,  Dmitry KLOCHKOV ,  Thomas KORB

IPC: G03F7/20

Abstract: In a method for characterizing at least one optical component of a projection exposure apparatus (1), an intensity distribution of the illumination radiation (2) is detected in a field plane of the projection exposure apparatus (1) with a measuring device (31) and predicted values of an optical parameter are spatially determined therefrom over at least one predefined surface.