公开(公告)号：US10139618B2

公开(公告)日：2018-11-27

申请号：US15701803

申请日：2017-09-12

Applicant: Carl Zeiss SMT GmbH

Inventor： Jan Horn ,  Stefan Tuerk ,  Oscar Noordman ,  Ulrich Bihr

IPC: G02B26/08 ,  G03F7/20 ,  H02K41/035 ,  H02K49/04

Abstract: A multi-mirror array including displaceable mirror elements includes a passive electric damping mechanism for damping disturbances of the displacement positions of the mirror elements.

公开(公告)号：US20180003951A1

公开(公告)日：2018-01-04

申请号：US15701803

申请日：2017-09-12

Applicant: Carl Zeiss SMT GmbH

Inventor： Jan Horn ,  Stefan Tuerk ,  Oscar Noordman ,  Ulrich Bihr

IPC: G02B26/08 ,  G03F7/20 ,  H02K41/035 ,  H02K49/04

CPC classification number: G02B26/0833 ,  G02B26/0841 ,  G03F7/702 ,  H02K41/035 ,  H02K49/04

Abstract: A multi-mirror array including displaceable mirror elements includes a passive electric damping mechanism for damping disturbances of the displacement positions of the mirror elements.