公开(公告)号：US09788464B2

公开(公告)日：2017-10-10

申请号：US14302957

申请日：2014-06-12

申请人： CANON ANELVA CORPORATION

发明人： Kyosuke Sugi

IPC分类号： C23C16/00 ,  C23C16/50 ,  C23F1/00 ,  H01L21/306 ,  H05K7/20 ,  H01L21/687 ,  H01L21/683 ,  H01J37/32 ,  H01L21/67

CPC分类号： H05K7/2089 ,  H01J37/32715 ,  H01L21/67109 ,  H01L21/6831 ,  H01L21/6833 ,  H01L21/68764 ,  H01L21/68792 ,  H05K7/20009

摘要： A power supply device supplies power to a substrate holder having a plurality of electrodes. The device includes a first fixed conductive member, a second fixed conductive member, a fixed insulating member fixed to an insulating housing portion and configured to insulate the first fixed conductive member from the second fixed conductive member, a first rotation conductive member, a second rotation conductive member, a rotation insulating member fixed to an insulating column portion and configured to insulate the first rotation conductive member from the second rotation conductive member, a first power supply member configured to supply a first voltage to the substrate holder via the first rotation conductive member and the first fixed conductive member, and a second power supply member configured to supply a second voltage to the substrate holder via the second rotation conductive member and the second fixed conductive member.

公开(公告)号：US10141208B2

公开(公告)日：2018-11-27

申请号：US14831597

申请日：2015-08-20

申请人： CANON ANELVA CORPORATION

发明人： Ryo Ishizaki ,  Daisuke Kobinata ,  Naoki Kubota ,  Kyosuke Sugi

IPC分类号： H01L21/67 ,  C23C14/22 ,  C23C14/54 ,  H01J37/32 ,  H01L21/687

摘要： A vacuum processing apparatus includes a tilting unit configured to tilt, in a vacuum vessel, a substrate holder including a refrigerator, and a rotary joint provided in the tilting unit and including a coolant path configured to supply or exhaust a coolant gas to or from the refrigerator. The rotary joint includes a fixed portion fixed to the vacuum vessel, a pivotal portion provided so as to pivot with respect to the fixed portion and fixed to the substrate holder, and a grease supply passage.

公开(公告)号：US20130113169A1

公开(公告)日：2013-05-09

申请号：US13728607

申请日：2012-12-27

申请人： Canon Anelva Corporation

发明人： Kyosuke Sugi

IPC分类号： H01L21/683

CPC分类号： H01L21/6833 ,  H01L21/67109 ,  H01L21/6831 ,  H01L21/68764 ,  H01L21/68792 ,  Y10T279/23

摘要： A power input mechanism includes a first stationary conductive member, a second stationary conductive member, a stationary insulating member which is fixed to a housing and insulates the first stationary conductive member and the second stationary conductive member from each other, a first rotary conductive member, a second rotary conductive member, a rotary insulating member which is fixed to a support column and insulates the first rotary conductive member and the second rotary conductive member from each other, a first power input member which supplies a first voltage to a substrate holder via the first rotary conductive member and the first stationary conductive member, and a second power input member which supplies a second voltage to the substrate holder via the second rotary conductive member and the second stationary conductive member.

摘要翻译： 电源输入机构包括第一固定导电构件，第二固定导电构件，固定绝缘构件，其固定到壳体并使第一固定导电构件和第二静止导电构件彼此绝缘;第一旋转导电构件， 第二旋转导电构件，旋转绝缘构件，固定到支撑柱并使第一旋转导电构件和第二旋转导电构件彼此绝缘;第一电力输入构件，其经由基座保持器经由 第一旋转导电构件和第一固定导电构件;以及第二电力输入构件，其经由第二旋转导电构件和第二静止导电构件向基板保持器提供第二电压。