公开(公告)号：US20180308888A1

公开(公告)日：2018-10-25

申请号：US15961819

申请日：2018-04-24

Applicant: California Institute of Technology

Inventor： Dagny Fleischman ,  Harry A. Atwater

IPC: H01L27/146 ,  G02B5/20 ,  G03F7/00 ,  G03C7/12

Abstract: Narrowband light filters, and methods of manufacturing such light filters, are provided. A narrowband light filter may include at least two electrically conductive bodies, an electrically conductive thin film layer disposed between the at least two electrically conductive bodies, at least one protective oxide layer disposed on the thin film layer and electrically conductive bodies, and at least one slit disposed through the electrically conductive thin layer. In various embodiments, the electrically conductive bodies give the narrowband light filter a mirrored structure in exemplary embodiments of the invention. The narrowband filters may also include one or more slits. Multiple slits may be configured to make the narrowband filtration polarization-independent. A plurality of narrowband light filters may be configured into pixel arrays. Pixel arrays may also be used in multispectral or hyperspectral imaging apparatus and techniques.

公开(公告)号：US10818711B2

公开(公告)日：2020-10-27

申请号：US15961819

申请日：2018-04-24

Applicant: California Institute of Technology

Inventor： Dagny Fleischman ,  Harry A. Atwater

IPC: H01L31/0232 ,  H01L27/146 ,  G02B5/20 ,  G03C7/12 ,  G03F7/00

Abstract: Narrowband light filters, and methods of manufacturing such light filters, are provided. A narrowband light filter may include at least two electrically conductive bodies, an electrically conductive thin film layer disposed between the at least two electrically conductive bodies, at least one protective oxide layer disposed on the thin film layer and electrically conductive bodies, and at least one slit disposed through the electrically conductive thin layer. In various embodiments, the electrically conductive bodies give the narrowband light filter a mirrored structure in exemplary embodiments of the invention. The narrowband filters may also include one or more slits. Multiple slits may be configured to make the narrowband filtration polarization-independent. A plurality of narrowband light filters may be configured into pixel arrays. Pixel arrays may also be used in multispectral or hyperspectral imaging apparatus and techniques.