公开(公告)号：US20170010164A1

公开(公告)日：2017-01-12

申请号：US15119311

申请日：2015-05-06

Applicant: CSMC TECHNOLOGIES FABI CO., LTD.

Inventor： Dongbiao QIAN

IPC: G01L1/24 ,  G01L1/04

CPC classification number: G01L1/242 ,  G01L1/04 ,  G01L7/086

Abstract: A pressure sensor (10) comprising: a detection film (200) which is arranged on a silicon substrate (100) and is used for detecting a pressure which is applied to the surface of the detection film and generating a bulge deformation which adapts to the size of the pressure; an optical transmitter (300) and an optical detector (400) which are arranged on the silicon substrate (100), are located on a plane which is parallel to a plane where the detection film (200) is located, and are oppositely arranged at two sides of the detection film (200); and a pressure calculation module which is connected to the optical detector (400) and is used for acquiring detected light intensity data, and calculating a pressure value according to the light intensity data.

Abstract translation: 一种压力传感器（10），包括：检测膜（200），其设置在硅基板（100）上，用于检测施加到所述检测膜的表面的压力，并产生适应于 压力大小; 布置在硅基板（100）上的光发射器（300）和光检测器（400）位于与检测膜（200）所在的平面平行的平面上，并且相对地布置在 检测膜（200）的两侧; 以及压力计算模块，其连接到光学检测器（400），并用于获取检测到的光强度数据，并根据光强度数据计算压力值。