SUBSTRATE CUTTING AND SEPARATING SYSTEMS AND METHODS

    公开(公告)号:US20220193831A1

    公开(公告)日:2022-06-23

    申请号:US17554357

    申请日:2021-12-17

    Abstract: A method of forming a plurality of defects within a substrate with a laser beam focal line using a laser beam, each defect of the plurality of defects being a damage track within the substrate with a diameter of about 10 microns or less, the plurality of defects forming a contour line on the substrate. The substrate having a first surface and a second surface that is opposite from the first surface. The method further includes exerting (i) a first force on the first surface of the substrate at a location that is adjacent to the contour line and (ii) a second force on the second surface of the substrate at a location that is on the contour line. Additionally, the method includes breaking the substrate along the contour line and into a first substrate portion and a second substrate portion.

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