METHOD AND APPARATUS FOR CLEANING A GLASS SUBSTRATE

    公开(公告)号:US20190201948A1

    公开(公告)日:2019-07-04

    申请号:US16326821

    申请日:2017-08-24

    CPC classification number: B08B11/04 B08B5/023 B08B5/043 C03B17/064

    Abstract: An apparatus and method for cleaning a glass substrate is disclosed, the apparatus including a shroud assembly arranged along a conveyance path of a glass substrate such that an opening of shroud portion of the shroud assembly is adjacent the glass substrate. A nozzle assembly contained within a hollow interior space of the shroud assembly rotates while directing a jet of gas at the glass substrate, dislodging particulate. A vacuum is applied to a second interior hollow space defined by a skirt portion extending around the shroud, thereby removing the dislodged particulate. A second vacuum is applied to a back portion of the shroud to remove particulate accumulated in the shroud. The apparatus may further include a gas knife arranged adjacent the shroud assembly and a vacuum channel arranged below the shroud assembly.

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