公开(公告)号：US12042902B2

公开(公告)日：2024-07-23

申请号：US17455959

申请日：2021-11-22

Applicant: CHANGXIN MEMORY TECHNOLOGIES, INC.

Inventor： Zhengxian Zhang

IPC: B24B49/10 ,  B24B1/00 ,  G01L1/26 ,  G01L5/00 ,  H01L21/67

CPC classification number: B24B49/10 ,  B24B1/00 ,  G01L1/26 ,  G01L5/0076 ,  H01L21/67092 ,  H01L21/67253

Abstract: Force measurement system is provided. It includes: a grinding arm and a stressed layer, the stressed layer being configured to bear a force from the grinding arm; a base and a plurality of elastic bodies, the elastic bodies being fixed between the stressed layer and the base; a deformation sensor, configured to detect deformation of the elastic bodies; and an analysis device, configured to obtain the force on the stressed layer according to a detection result of the deformation sensor and an elastic constant of the elastic body.

公开(公告)号：US12066345B2

公开(公告)日：2024-08-20

申请号：US17611803

申请日：2021-07-20

Applicant: CHANGXIN MEMORY TECHNOLOGIES, INC.

Inventor： Zhengxian Zhang ,  Wei Pei

IPC: G01L5/00 ,  B24B49/00 ,  G01L1/26 ,  H01L21/67

CPC classification number: G01L5/0076 ,  B24B49/00 ,  G01L1/26 ,  H01L21/67092

Abstract: A force measurement system includes: a grinding arm and a force receiving device, the force receiving device being fixed on its one side and configured to receive a force from the grinding arm; a load cell, which is fixed on the force receiving device and configured to detect the force received by the force receiving device; and a grinding disk, which is fixed on the grinding arm that applies the force to the force receiving device through the grinding disk. The embodiments of the present application facilitate accurate acquisition of a force acting upon a grinded object during actual grinding.