公开(公告)号：US12092967B2

公开(公告)日：2024-09-17

申请号：US18159347

申请日：2023-01-25

Applicant: CANON KABUSHIKI KAISHA

Inventor： Ryota Makino ,  Wataru Yamaguchi

IPC: G03F9/00 ,  G03F7/00

CPC classification number: G03F9/7088 ,  G03F7/70625 ,  G03F7/70633 ,  G03F9/7092

Abstract: A method of determining a position of a mark including a first pattern arranged in a first layer of a substrate and a second pattern arranged in a second layer of the substrate, includes determining information concerning the position of the mark as provisional position information based on an image of the mark, acquiring relative position information indicating a relative position between the first pattern and the second pattern, and determining the position of the mark based on the provisional position information and the relative position information.