MEASUREMENT APPARATUS AND METHOD, PROGRAM, ARTICLE MANUFACTURING METHOD, CALIBRATION MARK MEMBER, PROCESSING APPARATUS, AND PROCESSING SYSTEM

    公开(公告)号:US20170116462A1

    公开(公告)日:2017-04-27

    申请号:US15298039

    申请日:2016-10-19

    Inventor: Makiko Ogasawara

    Abstract: A measurement apparatus includes: a projection device configured to project, upon an object, light having a pattern and light not having a pattern; an imaging device configured to image the object upon which the light having a pattern has been projected and obtain a pattern image, and image the object upon which the light not having a pattern has been projected and obtain an intensity image; and a processor configured to perform processing of recognizing a region of the object, by performing processing of correcting distortion in the pattern image, based on first calibration data, and performing processing of correcting distortion in the intensity image, based on second calibration data different from the first calibration data.

    Absolute encoder
    2.
    发明授权

    公开(公告)号:US09880028B2

    公开(公告)日:2018-01-30

    申请号:US14754921

    申请日:2015-06-30

    Abstract: An absolute encoder includes: a scale on which plural marks are arrayed; plural detecting devices each configured to detect a mark group of the plural marks and output a signal corresponding to the mark group; and a processor configured to obtain a coordinate of the scale based on outputs of the detecting devices. The plural marks are arrayed such that a signal obtained by adding plural signals respectively output from the detecting devices includes a periodic signal corresponding to plural periods. The processor obtains first position data based on a magnitude of at least one signal of the plural signals, obtains second position data having a resolution higher than that of the first position data based on a phase of the periodic signal, and generates data representing the coordinate based on the first and second position data.

    Two-dimensional absolute encoder and scale with marks each having one of a plurality of different characteristic values
    4.
    发明授权
    Two-dimensional absolute encoder and scale with marks each having one of a plurality of different characteristic values 有权
    具有各自具有多个不同特征值之一的标记的二维绝对编码器和刻度

    公开(公告)号:US09267820B2

    公开(公告)日:2016-02-23

    申请号:US14022625

    申请日:2013-09-10

    CPC classification number: G01D5/34776 G01D5/2455 G01D5/34792

    Abstract: A two-dimensional absolute encoder includes a scale having marks arranged thereon along first and second directions different from each other, a detector configured to perform first detection that detects rows of a first number of marks arranged in the first direction and second detection that detects rows of a second number of marks arranged in the second direction, and a processor configured to determine absolute positions of the scale in the first and second directions based on outputs from the detector. Each of the marks has one of different characteristic values each corresponding to a combination of a quantized first code for indicating a position in the first direction and a quantized second code for indicating a position in the second direction, the number of the different characteristic values being smaller than the number of the combinations.

    Abstract translation: 二维绝对编码器包括具有沿着彼此不同的第一和第二方向布置在其上的标记的刻度;检测器,被配置为执行第一检测,其检测在第一方向上排列的第一数量的标记的行和检测行的第二检测 第二数量的标记被布置在第二方向上,以及处理器,其被配置为基于来自检测器的输出来确定第一和第二方向上的刻度的绝对位置。 每个标记具有不同的特征值之一,每个特征值对应于用于指示第一方向上的位置的量化的第一代码和用于指示第二方向上的位置的量化的第二代码的组合,不同的特征值的数量是 小于组合的数量。

    ABSOLUTE ENCODER
    5.
    发明申请
    ABSOLUTE ENCODER 有权
    绝对编码器

    公开(公告)号:US20160003645A1

    公开(公告)日:2016-01-07

    申请号:US14754921

    申请日:2015-06-30

    Abstract: An absolute encoder includes: a scale on which plural marks are arrayed; plural detecting devices each configured to detect a mark group of the plural marks and output a signal corresponding to the mark group; and a processor configured to obtain a coordinate of the scale based on outputs of the detecting devices. The plural marks are arrayed such that a signal obtained by adding plural signals respectively output from the detecting devices includes a periodic signal corresponding to plural periods. The processor obtains first position data based on a magnitude of at least one signal of the plural signals, obtains second position data having a resolution higher than that of the first position data based on a phase of the periodic signal, and generates data representing the coordinate based on the first and second position data.

    Abstract translation: 绝对编码器包括:排列有多个标记的刻度; 多个检测装置,其被配置为检测所述多个标记的标记组,并输出与所述标记组对应的信号; 以及处理器,被配置为基于检测装置的输出来获得刻度的坐标。 排列多个标记,使得通过添加从检测装置分别输出的多个信号获得的信号包括对应于多个周期的周期信号。 处理器基于多个信号的至少一个信号的幅度获得第一位置数据,基于周期信号的相位获得具有比第一位置数据的分辨率高的分辨率的第二位置数据,并且生成表示坐标的数据 基于第一和第二位置数据。

    ABSOLUTE ENCODER
    6.
    发明申请
    ABSOLUTE ENCODER 审中-公开
    绝对编码器

    公开(公告)号:US20150338239A1

    公开(公告)日:2015-11-26

    申请号:US14650621

    申请日:2014-02-26

    Inventor: Makiko Ogasawara

    CPC classification number: G01D5/12 G01D5/26 G01D5/34715 G01D5/34792

    Abstract: Provided is an absolute encoder that includes a scale in which a plurality of marks including a plurality of types of marks is arrayed with a gap and a period; a detector including a plurality of elements and configured to detect marks of the plurality of marks with the plurality of elements; and a processor configured to: generate a data sequence by quantizing periodic signals with a plurality of periods obtained by the detector with respect to each of the plurality of periods, and generate a first position data based on the data sequence; generate a second position data corresponding to a phase of a signal obtained by decreasing values of the periodic signals with respect to both end portions thereof; and generate data representing the absolute position based on the first position data and the second position data.

    Abstract translation: 提供了一种绝对编码器,其包括其间以间隙和周期排列包括多种类型的标记的多个标记的标尺; 检测器,包括多个元件,并且被配置为利用所述多个元件检测所述多个标记的标记; 以及处理器,被配置为:通过相对于所述多个周期中的每一个对由所述检测器获得的多个周期量化周期信号来生成数据序列,并且基于所述数据序列生成第一位置数据; 产生对应于通过相对于其两个端部减小周期信号的值而获得的信号的相位的第二位置数据; 并且基于第一位置数据和第二位置数据生成表示绝对位置的数据。

    Measurement apparatus, measurement method, and absolute encoder
    7.
    发明授权
    Measurement apparatus, measurement method, and absolute encoder 有权
    测量装置,测量方法和绝对编码器

    公开(公告)号:US09423276B2

    公开(公告)日:2016-08-23

    申请号:US14073348

    申请日:2013-11-06

    Inventor: Makiko Ogasawara

    CPC classification number: G01D5/26 G01D5/2455 G01D5/34792

    Abstract: A measurement apparatus includes: a detector which detects modulated light from the target object and outputs a periodic pattern signal; and a calculation unit which determines positions of two extreme values from the signal output from the detector, calculates a first total sum by multiplying the signal by first reference data in a region between the positions of the two extreme values, and adding the multiplication results, calculates a second total sum by multiplying the signal by second reference data with a phase difference of 90° with respect to the first reference data in the region, and adding the multiplication results, calculates a phase of the signal based on the first and second total sums, and calculates the position of the target object based on the calculated phase.

    Abstract translation: 测量装置包括:检测器,其检测来自目标物体的调制光并输出周期性图案信号; 以及计算单元,其根据从检测器输出的信号确定两个极值的位置,通过将信号乘以在两个极值的位置之间的区域中的第一参考数据来计算第一总和,并且相加乘法结果, 通过将信号乘以第二参考数据相对于该区域中的第一参考数据的90°的相位差来计算第二总和,并且相加乘法结果,基于第一和第二总数来计算信号的相位 并根据计算出的相位计算目标对象的位置。

    ABSOLUTE ENCODER, PROCESSING METHOD, PROGRAM, DRIVING APPARATUS, AND INDUSTRIAL MACHINE
    8.
    发明申请
    ABSOLUTE ENCODER, PROCESSING METHOD, PROGRAM, DRIVING APPARATUS, AND INDUSTRIAL MACHINE 审中-公开
    绝对编码器,处理方法,程序,驱动装置和工业机器

    公开(公告)号:US20150292919A1

    公开(公告)日:2015-10-15

    申请号:US14685032

    申请日:2015-04-13

    Inventor: Makiko Ogasawara

    Abstract: An absolute encoder includes a scale having a sequence of marks, a detector configured to detect a signal corresponding to a plurality of marks of the scale, and a processor configured to obtain an absolute position corresponding to the signal. The processor is configured to select code sequences, from a group of code sequences corresponding to absolute positions, as a candidate group for a code sequence corresponding to the signal, and to select the code sequence corresponding to the signal from the candidate group.

    Abstract translation: 绝对编码器包括具有标记序列的刻度,被配置为检测对应于刻度的多个标记的信号的检测器,以及被配置为获得与该信号相对应的绝对位置的处理器。 处理器被配置为从与绝对位置相对应的一组代码序列中选择代码序列作为与该信号相对应的代码序列的候选组,并且选择与来自候选组的信号相对应的代码序列。

    TWO-DIMENSIONAL ABSOLUTE ENCODER AND SCALE
    9.
    发明申请
    TWO-DIMENSIONAL ABSOLUTE ENCODER AND SCALE 有权
    两维绝对编码器和规模

    公开(公告)号:US20140070073A1

    公开(公告)日:2014-03-13

    申请号:US14022625

    申请日:2013-09-10

    CPC classification number: G01D5/34776 G01D5/2455 G01D5/34792

    Abstract: A two-dimensional absolute encoder includes a scale having marks arranged thereon along first and second directions different from each other, a detector configured to perform first detection that detects rows of a first number of marks arranged in the first direction and second detection that detects rows of a second number of marks arranged in the second direction, and a processor configured to determine absolute positions of the scale in the first and second directions based on outputs from the detector. Each of the marks has one of different characteristic values each corresponding to a combination of a quantized first code for indicating a position in the first direction and a quantized second code for indicating a position in the second direction, the number of the different characteristic values being smaller than the number of the combinations.

    Abstract translation: 二维绝对编码器包括具有沿着彼此不同的第一和第二方向布置在其上的标记的刻度;检测器,被配置为执行第一检测,其检测在第一方向上排列的第一数量的标记的行和检测行的第二检测 第二数量的标记被布置在第二方向上,以及处理器,其被配置为基于来自检测器的输出来确定第一和第二方向上的刻度的绝对位置。 每个标记具有不同的特征值之一,每个特征值对应于用于指示第一方向上的位置的量化的第一代码和用于指示第二方向上的位置的量化的第二代码的组合,不同的特征值的数量是 小于组合的数量。

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