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公开(公告)号：US20210082726A1
公开(公告)日：2021-03-18
申请号：US17016975
申请日：2020-09-10
摘要： Surface inspection apparatus includes stage for holding substrate, light source, scanning optical system for scanning light from the light source along first direction for plural times, stage scanning mechanism for scanning the stage in second direction intersecting with the first direction, and detector for detect scattered light from the substrate Inspection target region of the substrate is scanned by the light from the light source by an operation of the scanning optical system and the stage scanning mechanism. Chromatic aberration of the scanning optical system is corrected to fall within predetermined wavelength range. Fluctuation range of wavelength of the light from the light source is determined based on variation in total lighting time of the light source in scanning period of each light scanning operation along the first direction. The fluctuation range falls within the predetermined wavelength range.
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公开(公告)号：US11749546B2
公开(公告)日：2023-09-05
申请号：US17016975
申请日：2020-09-10
CPC分类号： H01L21/67288 , G01N21/01 , G01N21/47 , G01N21/9505 , G03F7/0002 , H01L21/0271 , H01L22/12 , G01N2201/021 , G01N2201/06113
摘要： Surface inspection apparatus includes stage for holding substrate, light source, scanning optical system for scanning light from the light source along first direction for plural times, stage scanning mechanism for scanning the stage in second direction intersecting with the first direction, and detector for detect scattered light from the substrate Inspection target region of the substrate is scanned by the light from the light source by an operation of the scanning optical system and the stage scanning mechanism. Chromatic aberration of the scanning optical system is corrected to fall within predetermined wavelength range. Fluctuation range of wavelength of the light from the light source is determined based on variation in total lighting time of the light source in scanning period of each light scanning operation along the first direction. The fluctuation range falls within the predetermined wavelength range.
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公开(公告)号：US20210366702A1
公开(公告)日：2021-11-25
申请号：US17324390
申请日：2021-05-19
发明人： Kohei Suzuki
摘要： An exposure apparatus comprising a holding part for holding an electric discharge lamp, the electric discharge lamp includes an electric discharge tube which covers an electric discharge space in which a pair of electrodes are disposed to face each other, a socket provided on one end of the electric discharge tube, a metal member which guides one of the pair of electrodes into the socket, wherein an opening for ventilation is provided in a bottom of the socket, the holding part includes a ventilation pipe to form a path for ventilation through the opening in the bottom of the socket, and a cooling part for cooling the metal member by supplying a cooling medium to the metal member through the ventilation pipe.
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公开(公告)号：US20210082682A1
公开(公告)日：2021-03-18
申请号：US17018092
申请日：2020-09-11
摘要： The present invention provides a lamp device comprising: a glass tube configured to cover a discharge space in which a pair of electrodes are arranged so as to face each other; and a bayonet cap portion provided in an end portion of the glass tube and electrically connected to one electrode of the pair of electrodes, wherein the bayonet cap portion is formed to have a shape including a bottom surface and a peripheral surface, and includes, in the bottom surface, a first opening configured to supply a gas to an inside of the bayonet cap portion and a second opening configured to exhaust the gas from the inside of the bayonet cap portion.
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公开(公告)号：US11521845B2
公开(公告)日：2022-12-06
申请号：US17018092
申请日：2020-09-11
摘要： The present invention provides a lamp device comprising: a glass tube configured to cover a discharge space in which a pair of electrodes are arranged so as to face each other; and a bayonet cap portion provided in an end portion of the glass tube and electrically connected to one electrode of the pair of electrodes, wherein the bayonet cap portion is formed to have a shape including a bottom surface and a peripheral surface, and includes, in the bottom surface, a first opening configured to supply a gas to an inside of the bayonet cap portion and a second opening configured to exhaust the gas from the inside of the bayonet cap portion.
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公开(公告)号：US11335548B2
公开(公告)日：2022-05-17
申请号：US17324390
申请日：2021-05-19
发明人： Kohei Suzuki
摘要： An exposure apparatus comprising a holding part for holding an electric discharge lamp, the electric discharge lamp includes an electric discharge tube which covers an electric discharge space in which a pair of electrodes are disposed to face each other, a socket provided on one end of the electric discharge tube, a metal member which guides one of the pair of electrodes into the socket, wherein an opening for ventilation is provided in a bottom of the socket, the holding part includes a ventilation pipe to form a path for ventilation through the opening in the bottom of the socket, and a cooling part for cooling the metal member by supplying a cooling medium to the metal member through the ventilation pipe.
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