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公开(公告)号:US10727804B2
公开(公告)日:2020-07-28
申请号:US15790999
申请日:2017-10-23
发明人: Songbin Gong , Ruochen Lu , Tomas Manzaneque Garcia , Cheng Tu , Daniel Shoemaker , Chengxi Zhao
摘要: An integrated circuit is a layered device, on a semiconductor substrate, which contains metal electrodes that sandwich a piezoelectric layer, followed by a magnetostrictive layer and a metal coil. The metal electrodes define an electrical port across which to receive an alternating current (AC) voltage, which is applied across the piezoelectric layer to cause a time-varying strain in the piezoelectric layer. The magnetostrictive layer is to translate the time-varying strain, received by way of a vibration mode from interaction with the piezoelectric layer, into a time-varying electromagnetic field. The metal coil, disposed on the magnetostrictive layer, includes a magnetic port at which to induce a current based on exposure to the time-varying electromagnetic field generated by the magnetostrictive layer.
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公开(公告)号:US20200350884A1
公开(公告)日:2020-11-05
申请号:US16947059
申请日:2020-07-16
发明人: Songbin Gong , Ruochen Lu , Tomas Manzaneque Garcia , Cheng Tu , Daniel Shoemaker , Chengxi Zhao
摘要: A method includes depositing a first metal layer on a semiconductor substrate; etching the first metal layer to form a first electrode having a first lead; depositing a piezoelectric layer on the semiconductor substrate and first electrode; etching the piezoelectric layer to a shape of the gyrator to be formed within the circulator; depositing a second metal layer on the piezoelectric layer; etching the second metal layer to form a second electrode having a second lead, the second electrode being positioned opposite the first electrode, wherein the first lead and the second lead form an electrical port; depositing a magnetostrictive layer on the second electrode; etching the magnetostrictive layer to approximately the shape of the piezoelectric layer; depositing a third metal layer on the magnetostrictive layer; and etching the third metal layer to form a metal coil that has a gap on one side to define a magnetic port.
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公开(公告)号:US11695382B2
公开(公告)日:2023-07-04
申请号:US16947059
申请日:2020-07-16
发明人: Songbin Gong , Ruochen Lu , Tomas Manzaneque Garcia , Cheng Tu , Daniel Shoemaker , Chengxi Zhao
CPC分类号: H03H7/002 , H01F10/126 , H01F10/20 , H01F10/265 , H01F21/08 , H03C1/46 , H03H2/001 , H10N30/00
摘要: A method includes depositing a first metal layer on a semiconductor substrate; etching the first metal layer to form a first electrode having a first lead; depositing a piezoelectric layer on the semiconductor substrate and first electrode; etching the piezoelectric layer to a shape of the gyrator to be formed within the circulator; depositing a second metal layer on the piezoelectric layer; etching the second metal layer to form a second electrode having a second lead, the second electrode being positioned opposite the first electrode, wherein the first lead and the second lead form an electrical port; depositing a magnetostrictive layer on the second electrode; etching the magnetostrictive layer to approximately the shape of the piezoelectric layer; depositing a third metal layer on the magnetostrictive layer; and etching the third metal layer to form a metal coil that has a gap on one side to define a magnetic port.
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公开(公告)号:US20180115294A1
公开(公告)日:2018-04-26
申请号:US15790999
申请日:2017-10-23
发明人: Songbin Gong , Rouchen Lu , Tomas Manzaneque Garcia , Cheng Tu , Daniel Shoemaker , Chengxi Zhao
CPC分类号: H03H7/002 , H01F10/126 , H01F10/20 , H01F10/265 , H01F21/08 , H01L41/00 , H03C1/46 , H03H2/001
摘要: An integrated circuit is a layered device, on a semiconductor substrate, which contains metal electrodes that sandwich a piezoelectric layer, followed by a magnetostrictive layer and a metal coil. The metal electrodes define an electrical port across which to receive an alternating current (AC) voltage, which is applied across the piezoelectric layer to cause a time-varying strain in the piezoelectric layer. The magnetostrictive layer is to translate the time-varying strain, received by way of a vibration mode from interaction with the piezoelectric layer, into a time-varying electromagnetic field. The metal coil, disposed on the magnetostrictive layer, includes a magnetic port at which to induce a current based on exposure to the time-varying electromagnetic field generated by the magnetostrictive layer.
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