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公开(公告)号:US20220354461A1
公开(公告)日:2022-11-10
申请号:US17416712
申请日:2020-09-28
发明人: Tingting ZHOU , Kuanjun PENG , Fangzhen ZHANG , Yanan NIU , Jintao PENG , Jing NIU , Shuang SUN , Lubin SHI , Jinyu REN
摘要: Embodiments of the present disclosure provide a flexible sensor, including a flexible substrate; a plurality of ultrasonic detectors, on the flexible substrate; and a plurality of detection circuits, respectively corresponding to the ultrasonic detectors; wherein each of the detection circuits is between the flexible substrate and the corresponding ultrasonic detector, and configured to drive the ultrasonic detector to emit an ultrasonic wave, and detect a detection signal output by the ultrasonic detector after receiving the ultrasonic wave; each of the ultrasonic detectors includes: a first electrode coupled to the corresponding detection circuit, a second electrode on a side of the first electrode away from the flexible substrate, and a piezoelectric induction layer between the first electrode and the second electrode; a plurality of holes are provided in a region other than a region where the detection circuits are located.