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公开(公告)号：US20170051395A1
公开(公告)日：2017-02-23
申请号：US15151292
申请日：2016-05-10
Applicant: BOE TECHNOLOGY GROUP CO., LTD.
Inventor： Dejiang ZHAO , Seiji FUJINO , Changhai FENG
CPC classification number: C23C14/243 , H01L51/001 , H01L51/0595 , H01L51/56 , H05B3/48
Abstract: The present disclosure provides an evaporation source and an evaporation device. The evaporation source includes a heat source structure and an evaporation container for accommodating a to-be-evaporated material. The heat source structure includes a heat source and a thermal conductor. The thermal conductor is in contact with the evaporation container, and the heat source is at the thermal conductor and around the evaporation container.
Abstract translation: 本发明提供蒸发源和蒸发装置。 蒸发源包括热源结构和用于容纳待蒸发材料的蒸发容器。 热源结构包括热源和热导体。 热导体与蒸发容器接触，热源位于热导体和蒸发容器周围。
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公开(公告)号：US20180247848A1
公开(公告)日：2018-08-30
申请号：US15730756
申请日：2017-10-12
Applicant: BOE TECHNOLOGY GROUP CO., LTD.
Inventor： Hanbo ZHENG , Li LI , Junwei YAN , Changhai FENG
IPC: H01L21/673 , B25B11/00
CPC classification number: H01L21/67393 , B25B11/005 , H01L21/67383 , H05K2203/0195
Abstract: The present disclosure discloses a vacuum adsorption unit and a vacuum adsorption carrier, wherein the vacuum adsorption unit comprises: a housing defining an air path through-hole therein, the air path through-hole provided with an upper abutting surface and a lower abutting surface; a piston movable provided in the air path through-hole and is located between the upper abutting surface and the lower abutting surface; an outer peripheral wall of the piston is slidably matched with an inner peripheral wall of the air path through-hole; an elastic member having both ends that respectively abut against the housing and the piston, to constantly drive the piston to abut on the upper abutting surface; and a pressure relief passage communicated with the air path through-hole, and is configured to be closed only when the piston moves to abut against the lower abutting surface.
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