公开(公告)号：US3924093A

公开(公告)日：1975-12-02

申请号：US35873073

申请日：1973-05-09

Applicant: BELL TELEPHONE LABOR INC

Inventor： FELDMAN MARTIN ,  ROUSSEAU DENIS LAWRENCE ,  SINCLAIR WILLIAM ROBERT ,  WEICK WALTER WERNER

IPC: G03B27/02 ,  B41C1/02 ,  G03C1/705 ,  G03F1/54 ,  G03F7/30 ,  H01L21/027 ,  H05K3/08 ,  B23K9/00

CPC classification number: G03F1/54 ,  G03C1/705 ,  H01L21/0275 ,  Y10S430/146

Abstract: Supported photomasks useful in the fabrication of printed circuitry are produced by laser machining of amorphous iron oxide film blanks. Resolution improvement relative to that obtained by use of other film materials is ascribed to crystallization of film regions bordering those which are volatilized.

Abstract translation: 用于制造印刷电路的支持的光掩模是通过激光加工无定形氧化铁薄膜坯料制成的。 与通过使用其它膜材料获得的分辨率提高相关的归因于与挥发的膜区域相邻的膜区域的结晶。