Patent search ap:("BELL TELEPHONE LABOR INC") AND inv:"PATEL JAMSHED R" Page 1

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发明授权
Process for controlling gas phase composition 失效
Title translation: 控制气相组成的方法

公开(公告)号：US3173802A

公开(公告)日：1965-03-16

申请号：US15935761

申请日：1961-12-14

Applicant: BELL TELEPHONE LABOR INC

Inventor： PATEL JAMSHED R , PFANN WILLIAM G

IPC: B01B1/00 , B01D3/34 , C23C16/52 , H01L21/00

CPC classification number: C23C16/52 , B01B1/005 , B01D3/346 , H01L21/00 , Y10S438/935

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