公开(公告)号：US12261407B2

公开(公告)日：2025-03-25

申请号：US17389400

申请日：2021-07-30

Applicant: BEIJING RSLASER OPTO-ELECTRONICS TECHNOLOGY CO., LTD.

Inventor： Zebin Feng ,  Xiaoquan Han ,  Rui Jiang ,  Junhong Yang ,  Hua Zhang ,  Qin Zhang ,  Xiang Wang ,  Mi Liao

IPC: H01S3/134 ,  H01S3/13 ,  H01S3/225

Abstract: A control method for stabilizing excimer laser pulse energy includes: obtaining a measured energy value of the n-th pulse in a pulse sequence; calculating the difference between the measured energy value and the preset energy value; taking the z-th pulse of the sequence as a demarcation point, when n is a positive integer less than z, the discharge voltage value of the next pulse is calculated according to a first mathematical model, and when n is an integer greater than z−1, the discharge voltage value of the next pulse is calculated according to a second mathematical model; and the next pulse is generated according to the discharge voltage value. A control system based on the control method includes: a high-voltage discharge module, a laser cavity, a laser parameter measurement module, and an energy stability controller.

公开(公告)号：US20210359487A1

公开(公告)日：2021-11-18

申请号：US17389400

申请日：2021-07-30

Applicant: Beijing Rslaser Opto-Electronics Technology Co., Ltd.

Inventor： Zebin Feng ,  Xiaoquan Han ,  Rui Jiang ,  Junhong Yang ,  Hua Zhang ,  Qin Zhang ,  Xiang Wang ,  Mi Liao

IPC: H01S3/13 ,  H01S3/11

Abstract: A control method for stabilizing excimer laser pulse energy includes: obtaining a measured energy value of the n-th pulse in a pulse sequence; calculating the difference between the measured energy value and the preset energy value; taking the z-th pulse of the sequence as a demarcation point, when n is a positive integer less than z, the discharge voltage value of the next pulse is calculated according to a first mathematical model, and when n is an integer greater than z−1, the discharge voltage value of the next pulse is calculated according to a second mathematical model; and the next pulse is generated according to the discharge voltage value. A control system based on the control method includes: a high-voltage discharge module, a laser cavity, a laser parameter measurement module, and an energy stability controller.