公开(公告)号：US09871473B2

公开(公告)日：2018-01-16

申请号：US14855667

申请日：2015-09-16

Applicant: Axcelis Technologies, Inc.

Inventor： Edward K. McIntyre ,  Thang D. Nguyen

IPC: H01T23/00 ,  H02N13/00 ,  H01L21/683 ,  H01L21/687

CPC classification number: H02N13/00 ,  H01L21/6833 ,  H01L21/68742

Abstract: A system and method for clamping a workpiece to an electrostatic clamp (ESC) comprises placing a first workpiece on a surface of the ESC and applying a first set of clamping parameters to the ESC, therein clamping the first workpiece to the surface of the ESC with a first clamping force. A degree of clamping of the workpiece to the ESC is determined and the application of the first set of clamping parameters to the ESC is halted based on a process recipe. A second set of clamping parameters is applied to the ESC after halting the application of the first set of clamping parameters to the ESC, and the workpiece is removed from the surface of the ESC concurrent with the application of the second set of clamping parameters to the ESC when the degree of clamping of the workpiece to the ESC is less than or approximately equal to a threshold clamping value. The second set of clamping parameters to the ESC is further halted after removing the workpiece from the surface of the ESC.

公开(公告)号：US20160087557A1

公开(公告)日：2016-03-24

申请号：US14855667

申请日：2015-09-16

Applicant: Axcelis Technologies, Inc.

Inventor： Edward K. McIntyre ,  Thang D. Nguyen

IPC: H02N13/00

CPC classification number: H02N13/00 ,  H01L21/6833 ,  H01L21/68742

Abstract: A system and method for clamping a workpiece to an electrostatic clamp (ESC) comprises placing a first workpiece on a surface of the ESC and applying a first set of clamping parameters to the ESC, therein clamping the first workpiece to the surface of the ESC with a first clamping force. A degree of clamping of the workpiece to the ESC is determined and the application of the first set of clamping parameters to the ESC is halted based on a process recipe. A second set of clamping parameters is applied to the ESC after halting the application of the first set of clamping parameters to the ESC, and the workpiece is removed from the surface of the ESC concurrent with the application of the second set of clamping parameters to the ESC when the degree of clamping of the workpiece to the ESC is less than or approximately equal to a threshold clamping value. The second set of clamping parameters to the ESC is further halted after removing the workpiece from the surface of the ESC.

Abstract translation: 将工件夹持到静电夹（ESC）的系统和方法包括将第一工件放置在ESC的表面上，并向ESC提供第一组夹紧参数，其中将第一工件夹紧到ESC的表面， 第一个夹紧力。 确定工件到ESC的夹紧程度，并且基于工艺配方停止对ESC的第一组夹紧参数的应用。 在停止将第一组夹紧参数应用于ESC之后，将第二组夹紧参数应用于ESC，并且将工件从ESC的表面移除，同时将第二组夹紧参数应用于 当ESC到ESC的夹紧程度小于或大致等于阈值钳位值时，ESC。 在从ESC表面移除工件后，ESC的第二组夹紧参数进一步停止。