公开(公告)号：US20200075379A1

公开(公告)日：2020-03-05

申请号：US16114745

申请日：2018-08-28

Applicant: Axcelis Technologies, Inc.

Inventor： Neil James Bassom

IPC: H01L21/68 ,  G02B5/30 ,  H01L21/66 ,  G01B11/26

Abstract: A workpiece alignment system has a light emission apparatus to direct a beam of light toward a first side of a workpiece through a first polarizer apparatus. A light receiver apparatus positioned on a second side of the workpiece receives the beam of light through a second polarizer apparatus between the workpiece and the light receiver apparatus. A workpiece support supports the workpiece. A rotation device selectively supports and rotates the workpiece support about a support axis. A controller determines a position of the workpiece based on an amount of the beam of light received by the light receiver apparatus. The controller determines a position of the workpiece when the workpiece is supported and rotated based, at least in part, on a rotational position of the workpiece support and at least a portion of the beam of light received by the light receiver apparatus.

公开(公告)号：US10720354B2

公开(公告)日：2020-07-21

申请号：US16114745

申请日：2018-08-28

Applicant: Axcelis Technologies, Inc.

Inventor： Neil James Bassom

IPC: G01B11/26 ,  G02B5/30 ,  H01L21/68 ,  H01L21/66

Abstract: A workpiece alignment system has a light emission apparatus to direct a beam of light toward a first side of a workpiece through a first polarizer apparatus. A light receiver apparatus positioned on a second side of the workpiece receives the beam of light through a second polarizer apparatus between the workpiece and the light receiver apparatus. A workpiece support supports the workpiece. A rotation device selectively supports and rotates the workpiece support about a support axis. A controller determines a position of the workpiece based on an amount of the beam of light received by the light receiver apparatus. The controller determines a position of the workpiece when the workpiece is supported and rotated based, at least in part, on a rotational position of the workpiece support and at least a portion of the beam of light received by the light receiver apparatus.