公开(公告)号：US20040100110A1

公开(公告)日：2004-05-27

申请号：US10305731

申请日：2002-11-26

Applicant: Axcelis Technologies, Inc.

Inventor： Paul W. Baumann ,  Michel Pharand ,  Donald N. Polner

IPC: B25J015/06

CPC classification number: B25J15/0616 ,  B25J9/0012 ,  H01L21/6838

Abstract: An end effector for installation on a robotic arm for transporting a plurality of semiconductor wafers from one location to another features a ceramic end effector body portion that includes a plurality of wafer engaging fingers that each feature wafer support pads. The wafer support pads are adapted to support a semiconductor wafer surface, and at least one of the support pads has a vacuum orifice. The body portion features an interior vacuum passageway having a first end that is adapted to connect to a vacuum source and a second end that terminates at the vacuum orifices such that a reduced gas pressure at the first end causes a vacuum to be exerted at the vacuum orifices. The interior passageway is formed from a groove in the end effector body portion and an end effector backplate that is sealingly connected to the end effector body portion to completely cover the groove from the first end to the second end. The ceramic body portion can be made of alumina or silicon carbide.

Abstract translation: 用于安装在机器人手臂上用于将多个半导体晶片从一个位置传送到另一个位置的端部执行器具有陶瓷端部执行器主体部分，其包括多个晶片接合指状物，每个晶片接合指状物都具有晶片支撑垫。 晶片支撑垫适于支撑半导体晶片表面，并且至少一个支撑垫具有真空孔。 主体部分具有内部真空通道，其具有适于连接到真空源的第一端和终止于真空小孔处的第二端，使得第一端处的减小的气体压力在真空下施加真空 孔。 内部通道由末端执行器主体部分中的凹槽和端部执行器后板形成，该后端板执行器密封地连接到端部执行器主体部分，以从第一端到第二端完全覆盖凹槽。 陶瓷体部分可以由氧化铝或碳化硅制成。