公开(公告)号：US08928042B2

公开(公告)日：2015-01-06

申请号：US12935270

申请日：2009-05-29

申请人： Atsushi Kandori ,  Chienliu Chang ,  Makoto Takagi

发明人： Atsushi Kandori ,  Chienliu Chang ,  Makoto Takagi

IPC分类号： H01L29/84 ,  B81B3/00

CPC分类号： B81B3/0086 ,  B81B2207/07

摘要： A structure having a plurality of conductive regions insulated electrically from each other comprises a movable piece supported movably above the upper face of the conductive region, the movable piece having an electrode in opposition to the conductive region, the structure being constructed to be capable of emitting and receiving electric signals through the lower face of the conductive region, the plural conductive regions being insulated by sequentially connected oxidized regions formed from an oxide of a material having through-holes or grooves.

摘要翻译： 具有彼此电绝缘的多个导电区域的结构包括可移动件，其被可移动地支撑在导电区域的上表面上方，所述可移动件具有与导电区域相对的电极，该结构被构造为能够发射 并且通过导电区域的下表面接收电信号，多个导电区域通过由具有通孔或凹槽的材料的氧化物形成的顺序连接的氧化区域而被绝缘。

公开(公告)号：US20100213791A1

公开(公告)日：2010-08-26

申请号：US12599688

申请日：2008-06-30

申请人： Atsushi Kandori ,  Chienliu Chang ,  Makoto Takagi

发明人： Atsushi Kandori ,  Chienliu Chang ,  Makoto Takagi

IPC分类号： H02N1/00 ,  H03B1/00

CPC分类号： B81B3/0086 ,  B81B2201/0242 ,  B81B2201/033 ,  B81B2203/058 ,  G01C19/5719

摘要： An oscillator device that includes a movable body oscillatably supported about a rotation axis, wherein the movable body is separated into plural electrically separated conductive regions in the thickness direction, and at least one of the plural electrically separated conductive regions in the thickness direction further has plural electrically separated conductive regions.

摘要翻译： 一种振荡器装置，包括围绕旋转轴可摆动地支撑的可移动体，其中所述可移动体在所述厚度方向上被分离为多个分离的导电区域，并且所述多个电分离的导电区域中的至少一个在所述厚度方向上还具有多个 电分离的导电区域。

公开(公告)号：US08339014B2

公开(公告)日：2012-12-25

申请号：US12599688

申请日：2008-06-30

申请人： Atsushi Kandori ,  Chienliu Chang ,  Makoto Takagi

发明人： Atsushi Kandori ,  Chienliu Chang ,  Makoto Takagi

IPC分类号： G02B26/08

CPC分类号： B81B3/0086 ,  B81B2201/0242 ,  B81B2201/033 ,  B81B2203/058 ,  G01C19/5719

摘要： An oscillator device that includes a movable body oscillatably supported about a rotation axis, wherein the movable body is separated into plural electrically separated conductive regions in the thickness direction, and at least one of the plural electrically separated conductive regions in the thickness direction further has plural electrically separated conductive regions.

摘要翻译： 一种振荡器装置，包括围绕旋转轴可摆动地支撑的可移动体，其中所述可移动体在所述厚度方向上被分离为多个分离的导电区域，并且所述多个电分离的导电区域中的至少一个在所述厚度方向上还具有多个 电分离的导电区域。

公开(公告)号：US20110031568A1

公开(公告)日：2011-02-10

申请号：US12935270

申请日：2009-05-29

申请人： Atsushi Kandori ,  Chienliu Chang ,  Makoto Takagi

发明人： Atsushi Kandori ,  Chienliu Chang ,  Makoto Takagi

IPC分类号： H01L29/84 ,  H01L21/02

CPC分类号： B81B3/0086 ,  B81B2207/07

摘要： A structure having a plurality of conductive regions insulated electrically from each other comprises a movable piece supported movably above the upper face of the conductive region, the movable piece having an electrode in opposition to the conductive region, the structure being constructed to be capable of emitting and receiving electric signals through the lower face of the conductive region, the plural conductive regions being insulated by sequentially connected oxidized regions formed from an oxide of a material having through-holes or grooves.

摘要翻译： 具有彼此电绝缘的多个导电区域的结构包括可移动件，其被可移动地支撑在导电区域的上表面上方，所述可移动件具有与导电区域相对的电极，该结构被构造为能够发射 并且通过导电区域的下表面接收电信号，多个导电区域通过由具有通孔或凹槽的材料的氧化物形成的顺序连接的氧化区域而被绝缘。

公开(公告)号：US09238250B2

公开(公告)日：2016-01-19

申请号：US13500284

申请日：2010-11-16

申请人： Atsushi Kandori ,  Makoto Takagi ,  Masao Majima ,  Kenichi Nagae

发明人： Atsushi Kandori ,  Makoto Takagi ,  Masao Majima ,  Kenichi Nagae

IPC分类号： G01S3/80 ,  B06B1/00 ,  B06B1/02 ,  G01S3/808

CPC分类号： H02N1/006 ,  B06B1/0246 ,  B06B1/0292 ,  G01S3/8083

摘要： Provided is a control apparatus and control method for a capacitive electromechanical transducer with small decrease in transmission/reception efficiency, and with sets of transmission/reception characteristics with different frequency ranges. The apparatus has cells each including first and second electrodes facing each other via a gap; includes a driving/detecting unit and an external stress applying unit. The driving/detecting unit performs at least one of causing the second electrode to vibrate and transmit elastic waves by generating an AC electrostatic attractive force between the electrodes, and detecting a change of capacity between the electrodes, the change being caused by the second electrode vibrating upon receipt of elastic waves. The external stress applying unit changes the external stress applied to the second electrode. The driving/detecting unit adjusts frequency characteristics by changing a parameter defining the frequency domain used in a transmitting/receiving operation, corresponding to the change of the external stress.

摘要翻译： 提供了一种用于容量式机电换能器的控制装置和控制方法，其具有小的发送/接收效率的降低以及具有不同频率范围的发送/接收特性的集合。 该装置具有各自包括经由间隙彼此面对的第一和第二电极的单元; 包括驱动/检测单元和外部应力施加单元。 驱动/检测单元执行以下至少一种：使第二电极通过在电极之间产生AC静电吸引力而振动并传播弹性波，并且检测电极之间的容量变化，由第二电极振动引起的变化 收到弹性波。 外部应力施加单元改变施加到第二电极的外部应力。 驱动/检测单元通过改变与发生/接收操作中使用的频域相对应的外部应力变化的参数来调整频率特性。

公开(公告)号：US20120194107A1

公开(公告)日：2012-08-02

申请号：US13500284

申请日：2011-11-16

申请人： Atsushi Kandori ,  Makoto Takagi ,  Masao Majima ,  Kenichi Nagae

发明人： Atsushi Kandori ,  Makoto Takagi ,  Masao Majima ,  Kenichi Nagae

IPC分类号： H02N1/00

CPC分类号： H02N1/006 ,  B06B1/0246 ,  B06B1/0292 ,  G01S3/8083

摘要： Provided is a control apparatus and control method for a capacitive electromechanical transducer with small decrease in transmission/reception efficiency, and with sets of transmission/reception characteristics with different frequency ranges. The apparatus has cells each including first and second electrodes facing each other via a gap; includes a driving/detecting unit and an external stress applying unit. The driving/detecting unit performs at least one of causing the second electrode to vibrate and transmit elastic waves by generating an AC electrostatic attractive force between the electrodes, and detecting a change of capacity between the electrodes, the change being caused by the second electrode vibrating upon receipt of elastic waves. The external stress applying unit changes the external stress applied to the second electrode. The driving/detecting unit adjusts frequency characteristics by changing a parameter defining the frequency domain used in a transmitting/receiving operation, corresponding to the change of the external stress.

摘要翻译： 提供了一种用于容量式机电换能器的控制装置和控制方法，其具有小的发送/接收效率的降低以及具有不同频率范围的发送/接收特性的集合。 该装置具有各自包括经由间隙彼此面对的第一和第二电极的单元; 包括驱动/检测单元和外部应力施加单元。 驱动/检测单元执行以下至少一种：使第二电极通过在电极之间产生AC静电吸引力而振动并传播弹性波，并且检测电极之间的容量变化，由第二电极振动引起的变化 收到弹性波。 外部应力施加单元改变施加到第二电极的外部应力。 驱动/检测单元通过改变与发生/接收操作中使用的频域相对应的外部应力变化的参数来调整频率特性。

公开(公告)号：US08176780B2

公开(公告)日：2012-05-15

申请号：US12371530

申请日：2009-02-13

申请人： Makoto Takagi ,  Atsushi Kandori

发明人： Makoto Takagi ,  Atsushi Kandori

IPC分类号： G01C19/56

CPC分类号： G01C19/5755 ,  G01C19/5762

摘要： An angular velocity sensor includes a supporting substrate, a detecting portion, a displacement detecting portion, a first driving portion, and a second driving portion. The detecting portion is supported by the supporting substrate movably in at least a free direction. The displacement detecting portion detects a displacement of the detecting portion in the free direction. The first driving portion excites a first reference oscillation of at least a portion of the detecting portion so that a first Coriolis' force in the free direction is generated in response to an angular velocity about a first axis. The second driving portion excites a second reference oscillation of at least a portion of the detecting portion so that a second Coriolis' force in the free direction is generated in response to an angular velocity about a second axis.

摘要翻译： 角速度传感器包括支撑基板，检测部分，位移检测部分，第一驱动部分和第二驱动部分。 检测部分由至少沿自由方向可移动地由支撑基板支撑。 位移检测部分检测检测部分在自由方向上的位移。 第一驱动部分激发检测部分的至少一部分的第一参考振荡，使得响应于关于第一轴的角速度产生沿自由方向的第一科里奥利力。 第二驱动部分激发检测部分的至少一部分的第二基准振荡，使得响应于关于第二轴的角速度产生在自由方向上的第二科里奥利力。

公开(公告)号：US08928203B2

公开(公告)日：2015-01-06

申请号：US13377925

申请日：2010-06-15

申请人： Atsushi Kandori ,  Makoto Takagi ,  Masao Majima

发明人： Atsushi Kandori ,  Makoto Takagi ,  Masao Majima

IPC分类号： A61B6/00 ,  H02N1/00 ,  B06B1/02

CPC分类号： H02N1/006 ,  B06B1/0292

摘要： The present invention relates to an electromechanical transducer capable of arbitrarily varying the amount of deflection of a vibrating membrane for every element.The electromechanical transducer includes a plurality of elements including at least one cell that includes a first electrode and a second electrode opposed to the first electrode with a gap sandwiched therebetween and a direct-current voltage applying unit configured to be provided for each element and to separately apply a direct-current voltage to the first electrodes in each element. The first electrodes and the second electrodes are electrically separated for every element.

摘要翻译： 本发明涉及能够任意改变每个元件的振动膜的偏转量的机电换能器。 机电换能器包括多个元件，其包括至少一个电池，其包括第一电极和与第一电极相对的第二电极，其间夹有间隙;以及直流电压施加单元，被配置为为每个元件提供并且分开地设置 对每个元件中的第一电极施加直流电压。 对于每个元件，第一电极和第二电极被电分离。

公开(公告)号：US08754660B2

公开(公告)日：2014-06-17

申请号：US12973733

申请日：2010-12-20

申请人： Atsushi Kandori ,  Makoto Takagi ,  Masao Majima

发明人： Atsushi Kandori ,  Makoto Takagi ,  Masao Majima

IPC分类号： G01R27/26 ,  G01D5/24

CPC分类号： G01R27/2605 ,  B06B1/0292 ,  B81C1/00246 ,  G01D5/24 ,  G01N29/2406 ,  G01N29/2412 ,  G01R27/26

摘要： A capacitive detection type electro-mechanical transducer comprises; a cell formed by a first electrode arranged on a substrate and a second electrode arranged on a vibration film, and a detection circuit for detecting a displacement of the vibration film, based on a capacity change between the first and second electrodes, wherein a plurality of the cells are classified into a plurality of groups, each one includes at least two cells, and the first electrodes or the second electrodes of the cells of the same one group are commonly connected to the same one detection circuit, and an addition circuit for adding, into single information, signals from the plurality of detection circuits corresponding to the plurality of groups, and for outputting the information, and a capacitive load for each one of the detectors are formulated to be dispersedly arranged.

摘要翻译： 电容式检测型机电换能器包括： 由布置在基板上的第一电极和布置在振动膜上的第二电极形成的单元，以及基于第一和第二电极之间的电容变化来检测振动膜的位移的检测电路，其中多个 单元被分成多个组，每个组包括至少两个单元，并且同一组单元的第一电极或第二电极共同连接到同一个检测电路，以及一个加法电路 分解为单个信息，来自与多个组对应的多个检测电路的信号，并且用于输出信息，并且将每个检测器的电容性负载配置为分散布置。

公开(公告)号：US20090205423A1

公开(公告)日：2009-08-20

申请号：US12371530

申请日：2009-02-13

申请人： Makoto Takagi ,  Atsushi Kandori

发明人： Makoto Takagi ,  Atsushi Kandori

IPC分类号： G01C19/56

CPC分类号： G01C19/5755 ,  G01C19/5762

摘要： An angular velocity sensor includes a supporting substrate, a detecting portion, a displacement detecting portion, a first driving portion, and a second driving portion. The detecting portion is supported by the supporting substrate movably in at least a free direction. The displacement detecting portion detects a displacement of the detecting portion in the free direction. The first driving portion excites a first reference oscillation of at least a portion of the detecting portion so that a first Coriolis' force in the free direction is generated in response to an angular velocity about a first axis. The second driving portion excites a second reference oscillation of at least a portion of the detecting portion so that a second Coriolis' force in the free direction is generated in response to an angular velocity about a second axis.

摘要翻译： 角速度传感器包括支撑基板，检测部分，位移检测部分，第一驱动部分和第二驱动部分。 检测部分由至少沿自由方向可移动地由支撑基板支撑。 位移检测部分检测检测部分在自由方向上的位移。 第一驱动部分激发检测部分的至少一部分的第一参考振荡，使得响应于关于第一轴的角速度产生沿自由方向的第一科里奥利力。 第二驱动部分激发检测部分的至少一部分的第二基准振荡，使得响应于关于第二轴的角速度产生在自由方向上的第二科里奥利力。