公开(公告)号：US20030000058A1

公开(公告)日：2003-01-02

申请号：US10126541

申请日：2002-04-22

Applicant: ASIA PACIFIC MICROSYSTEMS, INC.

Inventor： Shu-Hui Tsai ,  Chengkuo Lee ,  Chung-Hsien Lin ,  Ju-Mei Lu

IPC: H04R017/00 ,  H05K003/02

CPC classification number: H03H3/02 ,  Y10T29/42 ,  Y10T29/49128 ,  Y10T29/49155

Abstract: A method for manufacturing a film bulk acoustic wave filter, wherein a single-layer high-acoustic-impedance reflection layer is applied for the film bulk acoustic wave, for example, a diamond film with single-layer high-acoustic-impedance or a BCB film with single-layer low-acoustic-impedance is used as a reflection layer under the film bulk acoustic wave device in order to replace the cavity-reflective construction or the multi-layer reflection construction that are presently used; thus, there is no need for etching the cavity, the steadiness of the device and the yield of the device can be improved, and the FOM (figure of merit) of the film acoustic wave device is also improved; further, as there is no backside etching and front-side etching proceeded, the size of die is reduced greatly, so it is advantageous to mass production.

Abstract translation: 一种制造薄膜体声波滤波器的方法，其中单层高声阻抗反射层用于薄膜体声波，例如具有单层高声阻抗的金刚石薄膜或BCB 为了代替目前使用的空腔反射结构或多层反射结构，在薄膜体声波装置的下面使用具有单层低声阻抗的膜作为反射层; 因此，不需要蚀刻空腔，可以提高器件的稳定性和器件的产量，并且还提高了膜声波器件的FOM（品质因数）; 此外，由于没有背面蚀刻和前侧蚀刻，所以模具的尺寸大大降低，因此有利于批量生产。

公开(公告)号：US20040086218A1

公开(公告)日：2004-05-06

申请号：US10284266

申请日：2002-10-31

Applicant: ASIA PACIFIC MICROSYSTEMS, INC.

Inventor： Chun-Kai Liu ,  Chengkuo Lee

IPC: G02B006/26 ,  G02B006/28

CPC classification number: G02B6/12021 ,  G02B6/3518 ,  G02B6/3556 ,  G02B6/356 ,  G02B6/357 ,  G02B6/3582 ,  G02B6/3584 ,  H04J14/021 ,  H04J14/0212 ,  H04J14/0213

Abstract: The present invention generally relates to optical communication systems, and more particularly, to an apparatus combining microelectromechanical systems (MEMS) elements and optical wavelength division multiplexing/demultiplexing (WDM) elements for optical wavelength selective add/drop application. Wherein, optical fiber arrays or optical planar waveguide arrays are used as the input terminal and the output terminal of multiple optical signals. Moreover, 1nullN one-dimensional micro-mirror arrays manufactured by using the MEMS technology are applied to change the transmitting directions of the optical signal of each channel between the input terminals and the output terminals, thus, it achieves the purpose of switching the optical signals from one channel of input terminals to another corresponding channel of output terminals. If the above-mentioned optical fiber arrays or optical planar waveguide arrays are replaced or combined with arrayed waveguide gratings (AWG) as multiplexers and demultiplexers, this apparatus can be applied as a wavelength selective optical add/drop multiplexer (OADM), or a reconfigurable optical add/drop multiplexer (ROADM), and is capable of achieving the high-channel-counts demands of all-optical network in the future.

Abstract translation: 本发明一般涉及光通信系统，更具体地说，涉及组合用于光波长选择性分插应用的微机电系统（MEMS）元件和光波分复用/解复用（WDM）元件的装置。 其中，光纤阵列或光学平面波导阵列用作多个光信号的输入端和输出端。 而且，通过使用MEMS技术制造的1xN一维微镜阵列被应用于改变输入端和输出端之间的每个通道的光信号的发送方向，从而达到切换光信号的目的 从一个通道的输入端子到另一个相应的输出端子通道。 如果上述光纤阵列或光学平面波导阵列被替换或与阵列波导光栅（AWG）组合作为多路复用器和解复用器，则该装置可以被应用为波长选择性光分插复用器（OADM）或可重新配置 光分插复用器（ROADM），能够实现未来全光网络的高通道数需求。

公开(公告)号：US20040240779A1

公开(公告)日：2004-12-02

申请号：US10448392

申请日：2003-05-30

Applicant: Asia Pacific Microsystems, Inc.

Inventor： Jer-Liang A. Yeh ,  Chih-Chung Chen ,  Yen-Jyh Lai ,  Wen-Chih Chen ,  Chengkuo Lee

IPC: G02B006/26

CPC classification number: G02B6/353 ,  G02B6/3546 ,  G02B6/3552 ,  G02B6/3568 ,  G02B6/3584

Abstract: Disclosed is a retro-reflective type optical signal processing device and method, particularly to a device includes a set of optical mirror planes with retro-reflective type layout and configuration, and a set of micro-shutters controlled by microelectromechanical actuators, whereas the optical signals in propagation can be blocked or partially blocked in terms of the position of said a set of micro-shutters corresponding to the optical signal transmission path, thereby the method of said approach to determine the range of attenuated optical signal is a variable optical attenuation function demonstrated by present invention. Such a retro-reflective type optical signal processing device and method further comprises a set of three reflective mirrors and micro-shutters with reflective mirrors. Thereby this device has the capability to switch 2 sets of retro-reflected optical light transmission paths, the method of said approach is a demonstration of 2null2 optical switching function.

Abstract translation: 公开了一种逆反射型光信号处理装置和方法，特别涉及一种装置，包括具有回射型布局和配置的一组光学镜面，以及由微机电致动器控制的一组微快门，而光信号 就所述一组微光闸对应于光信号传输路径的位置而言，传播可被阻挡或部分阻塞，因此所述确定衰减光信号范围的方法是示出的可变光衰减函数 通过本发明。 这种回射型光信号处理装置和方法还包括一组具有反射镜的三个反射镜和微快门。 因此，该装置具有切换2组反射光传输路径的能力，所述方法的方法是2x2光切换功能的演示。