公开(公告)号：US11881378B2

公开(公告)日：2024-01-23

申请号：US17743965

申请日：2022-05-13

Applicant: Applied Materials, Inc.

Inventor： Glen F. R. Gilchrist ,  Yufeng Qiu

IPC: H01J37/30 ,  H01J37/305

CPC classification number: H01J37/3007 ,  H01J37/3053 ,  H01J2237/3151

Abstract: Provided herein are approaches for angle control of neutral reactive species ion beams. In one approach, a workpiece processing apparatus may include a plasma source operable to generate a plasma within a plasma chamber enclosed by a chamber housing, and an extraction plate coupled to the chamber housing. The extraction plate may include a plurality of channels for delivering one or more radical beams to a workpiece, wherein each of the plurality of channels has a lengthwise axis oriented at a non-zero angle relative to a perpendicular extending from a main surface of the workpiece, wherein each channel of the plurality of channels has a channel length and a channel width, and wherein the channel width varies along the channel length.

公开(公告)号：US20230369013A1

公开(公告)日：2023-11-16

申请号：US17743965

申请日：2022-05-13

Applicant: Applied Materials, Inc.

Inventor： Glen F. R. Gilchrist ,  Yufeng Qiu

IPC: H01J37/30 ,  H01J37/305

CPC classification number: H01J37/3007 ,  H01J37/3053 ,  H01J2237/3151

Abstract: Provided herein are approaches for angle control of neutral reactive species ion beams. In one approach, a workpiece processing apparatus may include a plasma source operable to generate a plasma within a plasma chamber enclosed by a chamber housing, and an extraction plate coupled to the chamber housing. The extraction plate may include a plurality of channels for delivering one or more radical beams to a workpiece, wherein each of the plurality of channels has a lengthwise axis oriented at a non-zero angle relative to a perpendicular extending from a main surface of the workpiece, wherein each channel of the plurality of channels has a channel length and a channel width, and wherein the channel width varies along the channel length.