公开(公告)号：US20220127723A1

公开(公告)日：2022-04-28

申请号：US17079155

申请日：2020-10-23

Applicant: Applied Materials, Inc.

Inventor： Jian Li ,  Juan Carlos Rocha-Alvarez ,  Mayur Govind Kulkarni ,  Paul L. Brillhart ,  Vidyadharan Srinivasamurthy ,  Katherine Woo ,  Wenhao Zhang

IPC: C23C16/458 ,  H01J37/32

Abstract: Exemplary substrate support assemblies may include an electrostatic chuck body defining a support surface that defines a substrate seat. The substrate support surface may include a dielectric coating. The substrate support assemblies may include a support stem coupled with the electrostatic chuck body. The substrate support assemblies may include a cooling hub positioned below a base of the support stem and coupled with a cooling fluid source. The electrostatic chuck body may define at least one cooling channel that is in communication with a cooling fluid source. The substrate support assemblies may include a heater embedded within the electrostatic chuck body. The substrate support assemblies may include an AC power rod extending through the support stem and electrically coupled with the heater. The substrate support assemblies may include a plurality of voids formed within the electrostatic chuck body between the at least one cooling channel and the heater.

公开(公告)号：US20230011261A1

公开(公告)日：2023-01-12

申请号：US17371592

申请日：2021-07-09

Applicant: Applied Materials, Inc.

Inventor： Jian Li ,  Edward P. Hammond ,  Vidyadharan Srinivasamurthy ,  Juan Carlos Rocha-Alvarez

IPC: H01J37/32 ,  H01L21/683

Abstract: Exemplary substrate support assemblies may include an electrostatic chuck body defining a substrate support surface that defines a substrate seat. The substrate support assemblies may include a support stem coupled with the electrostatic chuck body. The substrate support assemblies may include an upper heater embedded within the electrostatic chuck body. The upper heater may include a center heater zone and one or more annular heater zones that are concentric with the center heating zone. The substrate support assemblies may include a lower heater embedded within the electrostatic chuck body at a position below the upper heater. The lower heater may include a plurality of arcuate heater zones.