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公开(公告)号：US20210114832A1
公开(公告)日：2021-04-22
申请号：US17251683
申请日：2018-06-14
Applicant: Applied Materials, Inc.
Inventor： Neil MORRISON , Uwe HERMANNS
Abstract: A roller device for guiding a flexible substrate is described. The roller device includes a support surface for contacting the flexible substrate, the support surface having a coating comprising an electronegative polymer. Further, a vacuum processing apparatus for processing a flexible substrate including the roller device and a method of processing a flexible substrate in the vacuum processing apparatus is described.
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