公开(公告)号：US20240096664A1

公开(公告)日：2024-03-21

申请号：US17945910

申请日：2022-09-15

Applicant: Applied Materials, Inc.

Inventor： Ruiping WANG ,  Ying WANG ,  Guan Huei SEE ,  Ananthkrishna JUPUDI ,  Praveen Kumar CHORAGUDI

IPC: H01L21/67 ,  B08B1/00 ,  B08B3/04 ,  B08B7/00 ,  B08B13/00 ,  F26B25/14 ,  G06T1/00

CPC classification number: H01L21/67207 ,  B08B1/001 ,  B08B3/04 ,  B08B7/0035 ,  B08B13/00 ,  F26B25/14 ,  G06T1/0014 ,  H01L21/6838

Abstract: Methods and apparatus for cleaning tooling parts in a substrate processing tool are provided herein. In some embodiments, a method of cleaning tooling parts in a substrate processing tool includes placing one or more dirty tools on a holder in a bonding chamber of a multi-chamber processing tool; transferring the holder from the bonding chamber to a cleaning chamber of the multi-chamber processing tool; cleaning the one or more dirty tools in the cleaning chamber to produce one or more cleaned tools; inspecting the one or more cleaned tools in an inspection chamber of the multi-chamber processing tool; and transferring the one or more cleaned tools to the bonding chamber