公开(公告)号：US20250033156A1

公开(公告)日：2025-01-30

申请号：US18784593

申请日：2024-07-25

Applicant: Applied Materials, Inc.

Inventor： Upendra UMMETHALA ,  Praveen CHORAGUDI ,  Kaushik ALAYAVALLI ,  Bhawesh AGRAWAL

IPC: B23Q7/14 ,  B23Q11/14

Abstract: A swapper assembly of a cluster tool includes a housing, at least two swappers, and a motor assembly. The at least two swappers are at least partially disposed within and rotatable relative to the housing. Each swapper includes a body, a first arm, and a second arm. The first arm and second arm are rotatable relative to the body. The motor assembly includes at least one motor, and the motor assembly is configured to operate the at least two swappers simultaneously to change the position of the first arm and second arm.