公开(公告)号：US20250118580A1

公开(公告)日：2025-04-10

申请号：US18377028

申请日：2023-10-05

Applicant: Applied Materials, Inc.

Inventor： Mingle TONG ,  Siqing LU

IPC: H01L21/67 ,  H01L21/677

Abstract: Methods, systems, and apparatus are provided for detecting a substrate in a chamber of a substrate processing system. In some embodiments, the system may include a sensor system comprising: a light source configured to generate light; a first light guide fixed relative to the light source and having a light input and a light output offset from the light input, the light input configured to receive light generated by the light source, wherein the first light guide guides the light between the light input and the light output so that the light output emits a light beam into a volume of the chamber; and a sensor configured to sense the light beam emitted from the light output.