公开(公告)号：US20200098559A1

公开(公告)日：2020-03-26

申请号：US16695793

申请日：2019-11-26

申请人： Applied Materials, Inc.

发明人： Ashish GOEL ,  Anantha SUBRAMANI ,  Maurice E. EWERT

IPC分类号： H01L21/02 ,  C23C16/48 ,  C23C14/54

摘要： In one embodiment, an adapter plate for a deposition chamber is provided. The adapter plate comprises a body, a mounting plate centrally located on the body, a first annular portion extending longitudinally from a first surface of the mounting plate and disposed radially inward from an outer surface of the mounting plate, a second annular portion extending longitudinally from an opposing second surface of the mounting plate and disposed radially inward from the outer surface of the mounting plate, and a mirror-finished surface disposed on the interior of the second annular portion, the mirror-finished surface having an average surface roughness of 6 Ra or less.