公开(公告)号：US11864299B2

公开(公告)日：2024-01-02

申请号：US17740859

申请日：2022-05-10

Applicant: Applied Materials, Inc.

Inventor： David Morrell ,  Dawei Sun ,  Qin Chen

IPC: H05F3/06

CPC classification number: H05F3/06

Abstract: A system and method for reducing charge on a workpiece disposed on a platen is disclosed. The system includes an ionizer to generate ionized gas from the source of backside gas. The ionizer may be used to introduce ionized gas into the backside gas channels of the platen. A controller is used to selectively allow backside gas and/or ionized gas into the backside gas channels. In certain embodiments, the platen also includes an exhaust channel in communication with an exhaust valve to ensure that the pressure within the volume between the top surface of the platen and the workpiece is maintained in a desired range. In one embodiment, the system includes a valving system in communication with the source of backside gas and also in communication with the ionizer. In another embodiment, the amount of ionization performed by the ionizer is programmable.

公开(公告)号：US11665786B2

公开(公告)日：2023-05-30

申请号：US16704269

申请日：2019-12-05

Applicant: Applied Materials, Inc.

Inventor： David Morrell ,  Dawei Sun

IPC: H05B1/02 ,  C23C16/32 ,  H05B3/14

CPC classification number: H05B1/0233 ,  C23C16/325 ,  H05B3/145 ,  H05B3/148

Abstract: A solid state heater and methods of manufacturing the heater is disclosed. The heater comprises a unitary component that includes portions that are graphite and other portions that are silicon carbide. Current is conducted through the graphite portion of the unitary structure between two or more terminals. The silicon carbide does not conduct electricity, but is effective at conducting the heat throughout the unitary component. In certain embodiments, chemical vapor conversion (CVC) is used to create the solid state heater. If desired, a coating may be applied to the unitary component to protect it from a harsh environment.

公开(公告)号：US20210176824A1

公开(公告)日：2021-06-10

申请号：US16704269

申请日：2019-12-05

Applicant: Applied Materials, Inc.

Inventor： David Morrell ,  Dawei Sun

IPC: H05B1/02 ,  H05B3/14 ,  C23C16/32

Abstract: A solid state heater and methods of manufacturing the heater is disclosed. The heater comprises a unitary component that includes portions that are graphite and other portions that are silicon carbide. Current is conducted through the graphite portion of the unitary structure between two or more terminals. The silicon carbide does not conduct electricity, but is effective at conducting the heat throughout the unitary component. In certain embodiments, chemical vapor conversion (CVC) is used to create the solid state heater. If desired, a coating may be applied to the unitary component to protect it from a harsh environment.

公开(公告)号：US20230371160A1

公开(公告)日：2023-11-16

申请号：US17740859

申请日：2022-05-10

Applicant: Applied Materials, Inc.

Inventor： David Morrell ,  Dawei Sun ,  Qin Chen

IPC: H05F3/06

CPC classification number: H05F3/06

Abstract: A system and method for reducing charge on a workpiece disposed on a platen is disclosed. The system includes an ionizer to generate ionized gas from the source of backside gas. The ionizer may be used to introduce ionized gas into the backside gas channels of the platen. A controller is used to selectively allow backside gas and/or ionized gas into the backside gas channels. In certain embodiments, the platen also includes an exhaust channel in communication with an exhaust valve to ensure that the pressure within the volume between the top surface of the platen and the workpiece is maintained in a desired range. In one embodiment, the system includes a valving system in communication with the source of backside gas and also in communication with the ionizer. In another embodiment, the amount of ionization performed by the ionizer is programmable.