公开(公告)号：US20210043429A1

公开(公告)日：2021-02-11

申请号：US16933926

申请日：2020-07-20

Applicant: Applied Materials, Inc.

Inventor： Hsin-wei TSENG ,  Casey Jane MADSEN ,  Yikai CHEN ,  Irena WYSOK ,  Halbert CHONG

IPC: H01J37/32 ,  C23C14/06 ,  C23C14/35 ,  C23C14/34 ,  H01J37/34

Abstract: Embodiments generally relate to a chamber component to be used in plasma processing chambers for semiconductor or display processing. In one embodiment, a chamber component includes a textured surface having a surface roughness ranging from about 150 microinches to about 450 microinches and a coating layer disposed on the textured surface. The coating layer may be a silicon layer having a purity ranging from about 90 weight percent to about 99 weight percent, a thickness ranging from about 50 microns to about 500 microns, and an electrical resistivity ranging from about 1 E-3 ohm*m to about 1 E3 ohm*m. The coating layer provides strong adhesion for materials deposited in the plasma processing chamber, which reduces the materials peeling from the chamber component. The coating layer also enables oxygen plasma cleaning for further reducing materials deposited on the chamber component and provides the protection of the textured surface located therebelow.