公开(公告)号：US20170106496A1

公开(公告)日：2017-04-20

申请号：US15176998

申请日：2016-06-08

Applicant: Applied Materials, Inc.

Inventor： Patrick ALA ,  Bo B. DING ,  Yongqi HU ,  Simon YAVELBERG ,  Mats LARSSON

IPC: B24B37/32

CPC classification number: B24B37/32

Abstract: An external clamp ring for a chemical mechanical polishing (CMP) carrier head having a hydrophobic coating, and a carrier head having the same are described herein. In one embodiment, an external clamp ring is provided that includes a cylindrical body having an outer cylindrical wall and an inner cylindrical wall. A hydrophobic layer disposed is on the outer cylindrical wall.