公开(公告)号：US20230269507A1

公开(公告)日：2023-08-24

申请号：US18095871

申请日：2023-01-11

Applicant: Apple Inc.

Inventor： Guo-Lun LUO ,  Gokhan HATIPOGLU ,  Peter C. HRUDEY ,  Scott C. GRINKER

IPC: H04R1/10

CPC classification number: H04R1/10 ,  H04R2201/003

Abstract: A micro-electromechanical systems (MEMS) package comprising: a MEMS package comprising a substrate and a lid coupled to the substrate; a piezoelectric valve coupled to the substrate and comprising a number of movable members operable to be deformed in opposite directions upon application of a voltage to modify an acoustic resistance of an acoustic port; and a first stopper defined by the substrate and a second stopper defined by the lid, the first stopper and the second stopper being aligned with the number of movable members and operable to prevent an undesirable defection of the number of movable members.

公开(公告)号：US20230270010A1

公开(公告)日：2023-08-24

申请号：US18095870

申请日：2023-01-11

Applicant: Apple Inc.

Inventor： Guo-Lun LUO ,  Gokhan HATIPOGLU ,  Peter C. HRUDEY

IPC: H10N30/20 ,  H10N30/87 ,  F16K31/00

CPC classification number: H10N30/2042 ,  H10N30/87 ,  F16K31/006

Abstract: A piezoelectric valve comprising: a fixed portion defining an opening; and a number of movable portions extending from the fixed portion over the opening and separated from one another by radially oriented slits, each movable portion of the number of movable portions comprising a first material layer and a second material layer, and at least one of the first material layer or the second material layer comprises a piezoelectric material that is operable to drive a displacement of the movable portion in a direction opposite to an adjacent movable portion sharing a same radially oriented slit upon application of a voltage.