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公开(公告)号:US07015413B2
公开(公告)日:2006-03-21
申请号:US10755474
申请日:2004-01-13
申请人: Andrei Petrin , Ji-hyun Hur , Jai-kwang Shin
发明人: Andrei Petrin , Ji-hyun Hur , Jai-kwang Shin
IPC分类号: B23K10/00
CPC分类号: H01J37/32266 , H01J37/32192 , H01J37/32678 , H05H1/46
摘要: A plasma generation system that is capable of generating uniform high-density plasma includes a microwave generator for generating microwaves, a refractor for altering a direction of propagation of the microwaves, and an electromagnetic unit for applying a magnetic field to plasma formed by the microwaves to generate electron cyclotron resonance (ECR).
摘要翻译: 能够产生均匀的高密度等离子体的等离子体发生系统包括用于产生微波的微波发生器,用于改变微波传播方向的折射器,以及用于向由微波形成的等离子体施加磁场的电磁单元, 产生电子回旋共振(ECR)。
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公开(公告)号:US20050036878A1
公开(公告)日:2005-02-17
申请号:US10852501
申请日:2004-05-24
申请人: Andrei Petrin
发明人: Andrei Petrin
CPC分类号: H01L41/0953 , B65G27/24 , H01L41/0946 , H02N2/028 , Y10T74/20354
摘要: An actuator system for making a nanoscale movement of an object is provided. In the actuator system, a platform supports the object. A Z-axis actuator connects the platform to the object in a Z-axis direction, and moves the object in the Z-axis direction by Z-axis direction transformation. A frame supports the platform around the platform. An X-axis actuator connects the frame to the platform in an X-axis or Y-axis direction perpendicular to the Z-axis, and moves the object in the X-axis direction by transformation in the direction perpendicular to the Z-axis.
摘要翻译: 提供了用于进行物体的纳米级移动的致动器系统。 在执行器系统中,平台支撑物体。 Z轴致动器将平台与Z轴方向的物体连接起来,通过Z轴方向的变换使Z轴方向移动。 一个框架支持平台周围的平台。 X轴致动器在与Z轴垂直的X轴或Y轴方向上将框架连接到平台,并且通过沿与Z轴垂直的方向进行变换来使物体在X轴方向上移动。
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公开(公告)号:US20050018587A1
公开(公告)日:2005-01-27
申请号:US10844729
申请日:2004-05-13
申请人: Andrei Petrin
发明人: Andrei Petrin
IPC分类号: G11B9/00
CPC分类号: B82Y10/00 , G11B9/14 , G11B9/1409 , G11B9/1418 , G11B9/1445 , G11B9/1472 , G11B9/149 , G11B11/007 , G11B2005/0021
摘要: A nanoscale digital data storage device is provided. In the nanoscale digital data storage device, a storage medium has a polymer layer deposited on a substrate, for writing and reading digital data on and from. A cantilever chip has a plurality of cantilevers arranged therein. Each cantilever is fixed to another substrate at one end and has a tip formed at its free end, for emitting heat according to an applied current. The tips in the cantilever chip are in contact with the storage medium at predetermined bit positions during data writing, and the cantilever chip applies a relatively low current to a tip when the tip writes bit 1 and a relatively high current to the tip when the tip writes bit 0.
摘要翻译: 提供纳米级数字数据存储设备。 在纳米级数字数据存储装置中,存储介质具有沉积在基板上的聚合物层,用于在数字数据上进行写入和读取。 悬臂式芯片具有布置在其中的多个悬臂。 每个悬臂在一端固定到另一个基板,并且在其自由端处形成有一个尖端,用于根据所施加的电流发射热量。 在数据写入期间,悬臂芯片中的尖端与预定位位置处的存储介质接触,并且当尖端将尖端写入位1时,悬臂芯片向尖端施加相对低的电流,并且当尖端 写入位0。
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