公开(公告)号：US20180059044A1

公开(公告)日：2018-03-01

申请号：US15251833

申请日：2016-08-30

Applicant: Analog Devices Global

Inventor： Alfonso Berduque ,  Helen Berney ,  William Allan Lane ,  Raymond J. Speer ,  Brendan Cawley ,  Donal Mcauliffe ,  Patrick Martin McGuinness

IPC: G01N27/403

CPC classification number: G01N27/403 ,  G01N27/4045

Abstract: An electrochemical sensor is provided which may be formed using micromachining techniques commonly used in the manufacture of integrated circuits. This is achieved by forming microcapillaries in a silicon substrate and forming an opening in an insulating layer to allow environmental gases to reach through to the top side of the substrate. A porous electrode is printed on the top side of the insulating layer such that the electrode is formed in the opening in the insulating layer. The sensor also comprises at least one additional electrode. The electrolyte is then formed on top of the electrodes. A cap is formed over the electrodes and electrolyte. This arrangement may easily be produced using micromachining techniques.