公开(公告)号：US10692696B2

公开(公告)日：2020-06-23

申请号：US14287238

申请日：2014-05-27

Applicant: ASML Netherlands B.V.

Inventor： Teunis Van De Peut ,  Marco Jan-Jaco Wieland

IPC: H01J37/302 ,  H01J37/317 ,  H01J37/04 ,  H01J37/30 ,  G06T1/20 ,  B82Y10/00 ,  B82Y40/00 ,  G03F7/20 ,  G06T1/60 ,  H04N1/405

Abstract: A method for exposing a wafer in a charged particle lithography system. The method comprises generating a plurality of charged particle beamlets, the beamlets arranged in groups, each group comprising an array of beamlets; moving the wafer under the beamlets in a first direction at a wafer scan speed; deflecting the beamlets in a second direction substantially perpendicular to the first direction at a deflection scan speed, and adjusting the deflection scan speed to adjust a dose imparted by the beamlets on the wafer.

公开(公告)号：USRE48287E1

公开(公告)日：2020-10-27

申请号：US16150286

申请日：2018-10-03

Applicant: ASML Netherlands B.V.

Inventor： Guido De Boer ,  Ralph Van Melle ,  Teunis Van De Peut ,  Henk Derks ,  Frederik Matthias Spiegelhalder ,  Roy Josephus Stephanus Derks ,  Edwin Johannes Theodorus Smulders

IPC: G02B6/32 ,  H01J37/317 ,  B32B37/12 ,  B32B38/00 ,  B82Y10/00 ,  B82Y40/00 ,  G02B6/36 ,  B32B37/14

Abstract: A method for forming an optical fiber array. A substrate having a first surface and an opposing second surface is provided. The substrate is provided with a plurality of apertures extending through the substrate from the first surface to the second surface. In addition, a plurality of fibers are provided. The fibers have fiber ends with a diameter smaller than the smallest diameter of the apertures. A first fiber is inserted in a first corresponding aperture, from the first surface side of the substrate, such that the fiber end is positioned in close proximity of the second surface. The inserted first fiber is bent in a predetermined direction such that the fiber abuts a side wall of the first aperture at a predetermined position. After the first fiber is bent, a second fiber is inserted in a second corresponding aperture, from the first surface side of the substrate, such that the fiber end is positioned in close proximity of the second surface. The inserted second fiber is bent in conformity with a shape of the first fiber, such that the fiber abuts a side wall of the second aperture at a predetermined position. The bent fibers are bonded together using an adhesive material.