公开(公告)号：US20240085379A1

公开(公告)日：2024-03-14

申请号：US18268467

申请日：2021-12-15

Applicant: ASML Netherlands B.V.

Inventor： Mustafa Ümit ARABUL ,  Zili ZHOU ,  Willem Marie,Julia,Marcel COENE ,  Coen Adrianus VERSCHUREN ,  Paul, Louis,Maria Joseph VAN NEER ,  Daniele PIRAS ,  Sandra BLAAK ,  Wouter Dick KOEK ,  Robert Wilhelm WILLEKERS

IPC: G01N29/04 ,  G01N29/26 ,  G01N29/28

CPC classification number: G01N29/04 ,  G01N29/262 ,  G01N29/28 ,  G01N2291/023 ,  G01N2291/106

Abstract: A metrology apparatus for determining one or more parameters of a structure fabricated in or on a semiconductor substrate. The apparatus comprises a transducer array comprising a plurality of transducers positioned in a plane. The plurality of transducers comprises at least one transmitter transducer for emitting acoustic radiation in a frequency range from 1 GHz to 100 GHz towards the structure, and at least one receiver transducer for receiving acoustic radiation reflected and/or diffracted from the structure.