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公开(公告)号：US10681797B2
公开(公告)日：2020-06-09
申请号：US16552760
申请日：2019-08-27
Applicant: ASML Netherlands B.V.
Inventor： Michael Leslie Price , Cory Alan Stinson , Mark Joseph Mitry
Abstract: A method is described for measuring a moving property of a target. The method includes: forming a remaining plasma that at least partially coincides with an extended target region, the remaining plasma being a plasma formed from an interaction between a prior target and a prior radiation pulse in a target space; releasing a current target along a trajectory toward the target space that is at least partly overlapping the extended target region; determining one or more moving properties of the current target when the current target is within the extended target region and after a prior and adjacent target has interacted with a prior radiation pulse in the target space; and if any of the determined one or more moving properties of the current target are outside an acceptable range, then adjusting one or more characteristics of a radiation pulse directed toward the target space.
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Patent Agency Ranking
公开(公告)号：US20190069386A1
公开(公告)日：2019-02-28
申请号：US16174464
申请日：2018-10-30
Applicant: ASML Netherlands B.V.
Inventor： Michael Leslie Price , Cory Alan Stinson , Mark Joseph Mitry
IPC: H05G2/00
Abstract: A method is described for measuring a moving property of a target. The method includes: forming a remaining plasma that at least partially coincides with an extended target region, the remaining plasma being a plasma formed from an interaction between a prior target and a prior radiation pulse in a target space; releasing a current target along a trajectory toward the target space that is at least partly overlapping the extended target region; determining one or more moving properties of the current target when the current target is within the extended target region and after a prior and adjacent target has interacted with a prior radiation pulse in the target space; and if any of the determined one or more moving properties of the current target are outside an acceptable range, then adjusting one or more characteristics of a radiation pulse directed toward the target space.
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公开(公告)号：US10681796B2
公开(公告)日：2020-06-09
申请号：US16174464
申请日：2018-10-30
Applicant: ASML Netherlands B.V.
Inventor： Michael Leslie Price , Cory Alan Stinson , Mark Joseph Mitry
Abstract: A method is described for measuring a moving property of a target. The method includes: forming a remaining plasma that at least partially coincides with an extended target region, the remaining plasma being a plasma formed from an interaction between a prior target and a prior radiation pulse in a target space; releasing a current target along a trajectory toward the target space that is at least partly overlapping the extended target region; determining one or more moving properties of the current target when the current target is within the extended target region and after a prior and adjacent target has interacted with a prior radiation pulse in the target space; and if any of the determined one or more moving properties of the current target are outside an acceptable range, then adjusting one or more characteristics of a radiation pulse directed toward the target space.
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公开(公告)号：US20190387603A1
公开(公告)日：2019-12-19
申请号：US16552760
申请日：2019-08-27
Applicant: ASML Netherlands B.V.
Inventor： Michael Leslie Price , Cory Alan Stinson , Mark Joseph Mitry
IPC: H05G2/00
Abstract: A method is described for measuring a moving property of a target. The method includes: forming a remaining plasma that at least partially coincides with an extended target region, the remaining plasma being a plasma formed from an interaction between a prior target and a prior radiation pulse in a target space; releasing a current target along a trajectory toward the target space that is at least partly overlapping the extended target region; determining one or more moving properties of the current target when the current target is within the extended target region and after a prior and adjacent target has interacted with a prior radiation pulse in the target space; and if any of the determined one or more moving properties of the current target are outside an acceptable range, then adjusting one or more characteristics of a radiation pulse directed toward the target space.
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公开(公告)号：US10149375B2
公开(公告)日：2018-12-04
申请号：US15265373
申请日：2016-09-14
Applicant: ASML Netherlands B.V.
Inventor： Michael Leslie Price , Cory Alan Stinson , Mark Joseph Mitry
Abstract: A method is described for measuring a moving property of a target. The method includes: forming a remaining plasma that at least partially coincides with an extended target region, the remaining plasma being a plasma formed from an interaction between a prior target and a prior radiation pulse in a target space; releasing a current target along a trajectory toward the target space that is at least partly overlapping the extended target region; determining one or more moving properties of the current target when the current target is within the extended target region and after a prior and adjacent target has interacted with a prior radiation pulse in the target space; and if any of the determined one or more moving properties of the current target are outside an acceptable range, then adjusting one or more characteristics of a radiation pulse directed toward the target space.
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公开(公告)号：US20180077786A1
公开(公告)日：2018-03-15
申请号：US15265373
申请日：2016-09-14
Applicant: ASML Netherlands B.V.
Inventor： Michael Leslie Price , Cory Alan Stinson , Mark Joseph Mitry
IPC: H05G2/00
Abstract: A method is described for measuring a moving property of a target. The method includes: forming a remaining plasma that at least partially coincides with an extended target region, the remaining plasma being a plasma formed from an interaction between a prior target and a prior radiation pulse in a target space; releasing a current target along a trajectory toward the target space that is at least partly overlapping the extended target region; determining one or more moving properties of the current target when the current target is within the extended target region and after a prior and adjacent target has interacted with a prior radiation pulse in the target space; and if any of the determined one or more moving properties of the current target are outside an acceptable range, then adjusting one or more characteristics of a radiation pulse directed toward the target space.
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